Pressure sensors having stable gauge transducers
First Claim
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1. A pressure sensor structure comprising:
- a substrate;
a compliant member mounted on said substrate in a manner such that said compliant member has first and second opposing exposed surfaces; and
at least first and second strain transducers mounted to said compliant member so that their outputs respond oppositely to deflection of said compliant member resulting from differential pressure across said compliant member but respond similarly to deformation of the substrate;
wherein at least one strain transducer comprises a piezoresistor fabricated from a stable gauge material and is covered by a passivating layer.
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Abstract
Implantable pressure sensors and methods for making and using the same. A feature of at least some of the subject pressure sensors is that they are low-drift sensors. Additional features of representative pressure sensors include the presence of at least one strain transducer that is fabricated from a stable gauge material. The subject pressure sensors find use in a variety of applications.
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Citations
36 Claims
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1. A pressure sensor structure comprising:
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a substrate; a compliant member mounted on said substrate in a manner such that said compliant member has first and second opposing exposed surfaces; and at least first and second strain transducers mounted to said compliant member so that their outputs respond oppositely to deflection of said compliant member resulting from differential pressure across said compliant member but respond similarly to deformation of the substrate; wherein at least one strain transducer comprises a piezoresistor fabricated from a stable gauge material and is covered by a passivating layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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Specification