Plasma treatment system

• US 7,013,834 B2
• Filed: 12/20/2002
• Issued: 03/21/2006
• Est. Priority Date: 04/19/2002
• Status: Expired due to Term

• Current Assignee: Nordson Corporation
• Original Assignee: Nordson Corporation
• Inventors: Getty, James D., Tyler, James Scott, Bolden, Thomas V. II, Condrashoff, Robert Sergei
• Primary Examiner(s): Hassanzadeh, Parviz
• Assistant Examiner(s): CROWELL, ANNA M
• Application Number:
  US10/324,436
• Publication Number:
  US 20030196760A1
• Time in Patent Office: 1,187 Days
• Field of Search: 118/723.E, 118/723.R, 118/719, 118/715, 156/345.43, 156/345.44, 156/345.45, 156/345.46, 156/345.47, 156/345.3, 156/345.35
• US Class Current: 118/723.00E
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32422 Arrangement for selecting ions or species in the plasma

Abstract

A plasma treatment system for treating a workpiece with a downstream-type plasma. The processing chamber of the plasma treatment system includes a chamber lid having a plasma cavity disposed generally between a powered electrode and a grounded plate, a processing space separated from the plasma cavity by the grounded plate, and a substrate support in the processing space for holding the workpiece. A direct plasma is generated in the plasma cavity. The grounded plate is adapted with openings that remove electrons and ions from the plasma admitted from the plasma cavity into the processing space to provide a downstream-type plasma of free radicals. The openings may also eliminate line-of-sight paths for light between the plasma cavity and processing space. In another aspect, the volume of the processing chamber may be adjusted by removing or inserting at least one removable sidewall section from the chamber lid.

Claims

1. An apparatus for treating a workpiece with plasma, comprising:

a vacuum chamber having a chamber base and a chamber lid movable relative to said chamber base between a closed position that defines a processing space and an open position for transferring a workpiece into and out of said processing space, said chamber lid including a first sidewall section capable of being removed from said chamber lid for changing a vertical dimension of said vacuum chamber;

a vacuum port in said vacuum chamber for evacuating said processing space;

a workpiece holder located in said processing space;

a process gas supply port in said vacuum chamber for introducing a process gas to said processing space; and

a plasma excitation source operable to provide a plasma in said processing space from the process gas.

2. The apparatus of claim 1 wherein said chamber lid further comprises a plasma cavity, and said plasma excitation source includes a powered electrode and a grounded plate with a plurality of openings positioned between said plasma cavity and said processing space prohibiting the transfer of at least a portion of ions in the plasma from said plasma cavity to said processing space and allowing the transfer of at least a portion of free radicals in the plasma from said plasma cavity to said processing space.

3. The apparatus of claim 2 wherein said chamber lid further includes a ceiling section, and further comprising a second sidewall in sealing engagement with said chamber base, said first sidewall section being positioned between said ceiling section and said second sidewall section.

4. The apparatus of claim 3 further comprising a guide for aligning said first sidewall section with said second sidewall section.

5. The apparatus of claim 4 wherein said guide further aligns said second sidewall section with said ceiling section.

6. The apparatus of claim 3 further comprising a guide for aligning said first sidewall section with said ceiling section.

7. The apparatus of claim 1 wherein said plasma excitation source comprises a first powered electrode that is part of an assembly including said workpiece holder.

8. The apparatus of claim 1 further comprising:

a loading station configured for introducing the workpiece to said workpiece holder when said chamber lid is in the open position; and

an exit station configured for removing the workpiece from said workpiece holder when said chamber lid is in the open position.

9. The apparatus of claim 1 wherein said chamber lid further includes said process gas supply port and a plurality of passageways for distributing the process gas received from said process gas supply port to said plasma cavity.

10. The apparatus of claim 9 wherein said plasma excitation source includes a powered electrode located in said plasma cavity and an electrode insulator positioned between said powered electrode and said chamber lid, and said plurality of passageways includes a plurality of outlets proximate to said electrode insulator emitting the process gas that seeps around an outer periphery of said electrode insulator and an outer periphery of said powered electrode for substantially uniform distribution into said plasma cavity.