Cloverleaf microgyroscope with through-wafer interconnects and method of manufacturing a cloverleaf microgyroscope with through-wafer interconnects
First Claim
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1. A method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising:
- a) attaching a post wafer to a resonator wafer,b) forming a bottom post from the post wafer,c) preparing a base wafer with through-wafer interconnects,d) attaching the resonator wafer to the base wafer, wherein the bottom post fits into a post hole in the base wafer,e) forming a top post from the resonator wafer, wherein the bottom and top post are formed symmetrically around the same axis, andf) attaching a cap wafer on top of the base wafer.
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Abstract
The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, preparing a base wafer with through-wafer interconnects, attaching the resonator wafer to the base wafer, wherein the bottom post fits into a post hole in the base wafer, forming a top post from the resonator wafer, wherein the bottom and top post are formed symmetrically around the same axis, and attaching a cap wafer on top of the base wafer.
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19 Claims
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1. A method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising:
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a) attaching a post wafer to a resonator wafer, b) forming a bottom post from the post wafer, c) preparing a base wafer with through-wafer interconnects, d) attaching the resonator wafer to the base wafer, wherein the bottom post fits into a post hole in the base wafer, e) forming a top post from the resonator wafer, wherein the bottom and top post are formed symmetrically around the same axis, and f) attaching a cap wafer on top of the base wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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