Die encapsulation using a porous carrier

• US 7,015,075 B2
• Filed: 02/09/2004
• Issued: 03/21/2006
• Est. Priority Date: 02/09/2004
• Status: Expired due to Fees

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Inventors: Fay, Owen R., Amrine, Craig S., Lish, Kevin R.
• Primary Examiner(s): Guerrero, Maria F.
• Application Number:
  US10/774,977
• Publication Number:
  US 20050176180A1
• Time in Patent Office: 771 Days
• Field of Search: 438/106, 438/112, 438/118, 438/127, 257/686
• US Class Current: 438/127
• CPC Class Codes: H01L 21/56 Encapsulations, e.g. encapsulation layers, coatings
• CPC Class Codes: H01L 21/568 Temporary substrate used as encapsulation process aid H01L21/4832 and H01L21/566 take precedence
• CPC Class Codes: H01L 2224/96 the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A process for encapsulating an integrated circuit die (403) using a porous carrier (101). In one example, an adhesive structure (e.g. tape) is applied to a porous carrier. Integrated circuit die is then placed on the adhesive structure. The integrated circuit die is then encapsulated to form an encapsulated structure (505). The carrier is then subjected to a solvent that passes through the carrier to reduce the adhesive strength of the adhesive structure for removal of the carrier from the encapsulated structure.

Claims

1. A method comprising:

providing a porous carrier;

providing an adhesive structure overlying the porous carrier;

placing a first integrated circuit die over the adhesive structure;

encapsulating the first integrated circuit die to form an encapsulated structure; and

separating the porous carrier from the encapsulated structure, wherein the adhesive structure comprises an adhesive material in contact with the porous carrier, and wherein the separating the porous carrier from the encapsulated structure comprises using a solvent that is passed through the porous carrier to affect the adhesive structure.

2. The method of claim 1, wherein the using the solvent to affect the adhesive structure comprises using the solvent to reduce adhesive strength between the porous carrier and the adhesive material of the adhesive structure.

3. The method of claim 1, wherein the adhesive material is soluble by the solvent that is passed through the porous carrier.

4. The method of claim 1, wherein the adhesive structure comprises tape.

5. The method of claim 1, wherein the adhesive structure comprises photo resist.

6. The method of claim 1, wherein the porous carrier comprises at least one material selected from a group consisting of metal, ceramic, glass, plastic, and polymer.

7. The method of claim 1, further comprising:

prior to the encapsulating, placing a second integrated circuit die over the adhesive structure, wherein the encapsulating comprises encapsulating the first integrated circuit die and the second integrated circuit die to form the encapsulated structure.

8. The method of claim 1, wherein after the separating the porous carrier from the encapsulated structure, the method further comprises:

providing a second adhesive structure overlying the porous carrier;

placing a second integrated circuit die over the adhesive structure;

encapsulating the second integrated circuit die to form a second encapsulated structure; and

separating the porous carrier from the second encapsulated structure.

9. The method of claim 1, wherein the porous carrier comprises pores having a pore size diameter in a range of 0.02 microns to 30 microns.

10. The method of claim 1, wherein the adhesive structure comprises two-sided adhesive tape.

11. The method of claim 1, wherein the porous carrier is characterized by an open continuous porosity having at least a 0.02 microns diameter pore size.

12. The method of claim 10, wherein the two-sided adhesive tape comprises a die side adhesive material having a thickness of at least 30 microns and a carrier side adhesive material having a thickness of at least 50 microns, wherein the carrier side adhesive material is between the die side adhesive material and the porous carrier.

13. The method of claim 11, wherein the open continuous porosity has at most a 0.3 microns diameter pore size.

14. A method comprising:

providing a porous carrier, wherein the porous carrier comprises aluminum oxide embedded in a glass matrix;

providing an adhesive structure overlying the porous carrier;

placing a first integrated circuit die over the adhesive structure;

encapsulating the first integrated circuit die to form an encapsulated structure; and

separating the porous carrier from the encapsulated structure.

15. A method comprising:

providing a porous carrier;

adhering an adhesive structure to the porous carrier;

placing at least one integrated circuit die over the adhesive structure;

encapsulating the at least one integrated circuit die to form an encapsulated structure; and

removing the porous carrier from the encapsulated structure, wherein the removing comprises using a solvent that is passed through the porous carrier to reduce adhesive strength between the adhesive structure and the porous carrier.

16. The method of claim 15, wherein the solvent softens at least a portion of the adhesive structure.

17. The method of claim 15, wherein the solvent dissolves at least a portion of the adhesive structure.

18. The method of claim 15, wherein the removing the porous carrier is preformed at a temperature below a transition temperature (Tg) of an encapsulant material used in the encapsulating.

19. The method of claim 15, wherein the placing at least one integrated circuit die over the adhesive structure comprises placing a plurality of integrated circuit die in an array configuration over the adhesive structure, and wherein the encapsulating comprises encapsulating the plurality of integrated circuit die.

20. The method of claim 15, wherein the porous carrier is be reusable.

21. The method of claim 15, wherein the porous carrier comprises pores having a pore size diameter in a range of 0.02 microns to 30 microns.

22. The method of claim 15, wherein the porous carrier comprises at least one material selected from a group consisting of metal, ceramic, glass, plastic, and polymer.

23. The method or claim 15, wherein the using the solvent that is passed through the porous cater comprises placing at least a portion of the porous carrier into a bath having the solvent wherein the solvent is absorbed through the porous carrier via capillary action.

24. The method of claim 15, wherein the placing the at least one integrated circuit die over the adhesive structure comprises:

placing the at least one integrated circuit die over a package substrate; and

placing the package substrate over the adhesive structure.

25. The method of claim 15, wherein the adhesive structure comprises a tape.

26. The method of claim 15, wherein the porous carrier is characterized by an open continuous porosity having at least a 0.02 microns diameter pore size.

27. The method of claim 25, wherein the tape comprises a die side adhesive material having a thickness of at least 30 microns and a carrier side adhesive material having a thickness of at least 50 microns, wherein the carrier side adhesive material is in contact with the porous carrier.

28. The method of claim 26, wherein the open continuous porosity has at most a 0.3 microns diameter pore size.

29. A method comprising:

providing a reusable porous carrier including pores with a pore size diameter of at least 0.02 microns;

adhering an adhesive structure to the reusable porous carrier;

placing a plurality of integrated circuit die in an array configuration over the adhesive structure;

encapsulating the plurality of integrated circuit die to form an encapsulated structure; and

separating the reusable porous carrier from the encapsulated structure, wherein the separating comprises using a solvent that is passed through the porous carrier to reduce adhesive strength between the adhesive structure and the reusable porous carrier.

30. The method of claim 29, wherein after the separating, the method further comprises:

adhering a second adhesive structure to the reusable porous carrier;

placing a second plurality of integrated circuit die over the second adhesive structure;

encapsulating the second plurality of integrated circuit die to form a second encapsulated structure; and

separating the reusable porous carrier from the second encapsulated structure.

31. The method of claim 29, wherein the reusable porous carrier comprises at least one material selected from a group consisting of metal, ceramic, glass, plastic, and polymer.

32. The method of claim 29, wherein the reusable porous carrier comprises aluminum oxide embedded in a glass matrix.

33. The method of claim 29, wherein the reusable porous carrier is characterized by an open continuous porosity having at most a 0.3 microns diameter pore size.

34. The method of claim 29, wherein the separating is performed at a temperature of at most 90 degrees Celsius.