Lithographic apparatus and device manufacturing method

• US 7,016,016 B2
• Filed: 06/25/2004
• Issued: 03/21/2006
• Est. Priority Date: 06/25/2004
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: De Jager, Pieter Willem Herman, Munnig Schmidt, Robert-Han, Van Den Akker, Theodorus Leonardus
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US10/875,530
• Publication Number:
  US 20050286039A1
• Time in Patent Office: 634 Days
• Field of Search: 355/52, 355/53, 355/55, 355 67- 77, 250/548, 356399-401, 430/311
• US Class Current: 355/53
• CPC Class Codes: G03B 27/58 Baseboards, masking frames, or other holders for the sensitive material G03B27/53 takes precedence ; for electrophotographic copiers G03G15/65
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position
• CPC Class Codes: G03F 7/70791 Large workpieces, e.g. glass substrates for flat panel displays or solar panels
• CPC Class Codes: G03F 7/70816 Bearings
• CPC Class Codes: G03F 7/7085 Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
• CPC Class Codes: G03F 9/708 Mark formation
• CPC Class Codes: G03F 9/7084 Position of mark on substrate, i.e. position in (x, y, z) of mark, e.g. buried or resist covered mark, mark on rearside, at the substrate edge, in the circuit area, latent image mark, marks in plural levels
• CPC Class Codes: G03F 9/7088 Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Abstract

A lithographic apparatus patterns a projection beam of radiation using a patterning system. A substrate is supported on a substrate table and the patterned beam is projected onto the substrate on the table. A substrate displacement control system displaces the substrate relative to the table and the projection system in a predetermined direction, such that the patterned beam is scanned across the substrate. The position of the substrate relative to the table and the patterned beam is determined by the displacement control system. The displacement control system comprises at least one component that is displaceable with the substrate and a positioning apparatus to place that component in contact with the substrate, such that the component is displaced with the substrate as the projection beam is scanned across the substrate and such that the component is lifted from the substrate after the projection beams has been scanned across the substrate. The component could be, for example, an elongate strip carrying alignment marks or a magnet which is used to apply a displacement force to the substrate.

Claims

1. A lithographic apparatus, comprising:

an illumination system that supplies a projection beam of radiation;

an array of individually controllable elements that patterns the projection beam;

a projection system that projects the patterned beam onto a target portion of a substrate on a substrate table; and

a substrate displacement control system that (1) displaces the substrate relative to the substrate table and the projection system in a predetermined direction, such that the patterned beam is scanned across the substrate and (2) determines the position of the substrate relative to the substrate table and the projection beam, the displacement control system comprising;

at least one component that is displaceable with the substrate, and

a positioning apparatus to place the at least one component in contact with the substrate, such that (1) the at least one component is displaced with the substrate as the patterned beam is scanned across the substrate and (2) the at least one component is removed from the substrate after the patterned beam has been scanned across the substrate.

2. The apparatus of claim 1, further comprising:

a detector,

wherein the at least one component comprises at least one elongate strip on which alignment marks are formed,

wherein the positioning apparatus comprises a device that lays the at least one elongate strip on the substrate, such that the strip extends parallel to the predetermined direction, and

wherein the detector detects the alignment marks formed on the at least one elongated strip to determine the position of the substrate relative to the substrate table and the patterned beam.

3. The apparatus of claim 2, wherein:

the at least one elongate strip comprises two elongate strips having alignment marks formed on each; and

the positioning apparatus comprises devices that position alignment strips along opposite edges of the substrate.

4. The apparatus of claim 2, further comprising:

first and second reels, wherein each one of the at least one elongate strip extends between the first and second reels, such that during displacement of the substrate the first reel supplies the at least one elongated strip and the second reel takes up the at least one elongated strip.

5. The apparatus of claim 2, wherein each one of the at least one elongate strip is a continuous strip, which is supported so that during displacement of the substrate the continuous strip travels along a closed loop path.

6. The apparatus of claim 2, further comprising:

a device that applies a force to the at least one elongate strip to cause displacement of the substrate relative to the substrate table and the patterned beam.

7. The apparatus of claim 6, wherein the at least one elongate strip is magnetic, and wherein the displacement control system further comprises:

a device that generates a magnetic field, such that a force is applied to the at least one elongate strip to cause displacement of the substrate relative to the substrate table.

8. The apparatus of claim 6, wherein the displacement control system further comprises:

a device for pulling the at least one elongate strip, such that a force is applied to the substrate by the at least one elongate strip to cause displacement of the substrate relative to the substrate table.

9. The apparatus of claim 1, wherein:

the at least one component comprises at least one magnet;

the positioning apparatus comprises a device that (1) places the at least one magnet on the substrate before displacement of the substrate and (2) lifts the at least one magnet from the substrate after displacement of the substrate; and

the displacement control system further comprises a device that generates a magnetic field, such that a force is applied to the at least one magnet to cause displacement of the substrate relative to the substrate table.

10. The apparatus of claim 9, wherein:

the at least one magnet comprises two magnets; and

the positioning apparatus comprising a device that places the two magnets on opposite sides of the substrate.

11. The apparatus of claim 9, wherein the device that generates the magnetic field comprises at least one electromagnet.

12. The apparatus of claim 11, wherein the at least one electromagnet is supported in the substrate table.

13. The apparatus of claim 1, wherein the substrate table defines a static upper surface above which the substrate is supported on a bearing.

14. The apparatus of claim 13, wherein the bearing is an air bearing.

15. The apparatus of claim 1, wherein the at least one component comprises:

a support surface that bears against the substrate, the support surface resisting slippage relative to the substrate.

16. The apparatus of claim 15, wherein the support surface adheres electrostatically to a support.

17. The apparatus of claim 15, wherein the support surface is formed of a layer of resilient high friction material.

18. A device manufacturing method, comprising:

(a) patterning a projection beam of radiation with an array of individually controllable elements;

(b) projecting the patterned projection beam onto a target portion of a substrate on a table;

(c) displacing the substrate relative to the table and the projection system in a predetermined direction using a displacement system, such that the patterned projection beam is scanned across the substrate and the position of the substrate relative to the table and the projection system is determined; and

(d) displacing at least one component of the displacement system with the substrate, the at least one component being placed in contact with the substrate so as to be displaced with the substrate as the patterned projection beam is scanned across the substrate and being removed from the substrate after the patterned projection beam has been scanned across the substrate.

19. The method of claim 18, wherein step (d) comprises:

using an elongate strip on which alignment marks are formed as the at least one component, wherein the elongate strip is placed on the substrate so as to extend parallel to the predetermined direction.

20. The method of claim 19, further comprising:

placing two elongate strips on which alignment marks are formed along opposite edges of the substrate.

21. The method of claim 19, further comprising:

supplying the at least one elongate strip from a supply reel; and

taking up the at least one elongate strip from a take up reel.

22. The method of claim 19, further comprising:

using a continuous strip as the elongate strip that travels along a closed loop path during displacement of the substrate.

23. The method of claim 19, further comprising:

applying a force to the elongate strip to cause displacement of the substrate relative to the table and the patterned projection beam.

24. The method of claim 23, further comprising:

using a magnetic elongate strip as the elongate strip; and

generating a magnetic field to apply the force to displace the substrate.

25. The method of claim 23, further comprising:

pulling the strip to apply the force to displace the substrate.

26. The method of claim 18, wherein step (d) comprises:

using a magnet as the at least one component;

placing the magnet on the substrate; and

generating a magnetic field to apply a force to the magnet to cause displacement of the substrate relative to the table.

27. The method of claim 26, further comprising:

placing two of the magnets on opposite sides of the substrate.

28. The method of claim 26, further comprising:

generating the magnetic field by energizing at least one electromagnet.

29. The method of claim 28, further comprising:

supporting the at least one electromagnet in the table.

30. The method of claim 18, further comprising:

supporting the substrate on a bearing above a static upper surface of the table.

31. The method of claim 30, further comprising:

using an air bearing to support the substrate.

32. The method of claim 18, wherein step (d) comprises:

providing the at least one component with a support surface that bears against the substrate, such that the support surface is resistant to slippage relative to the substrate.

33. The method of claim 32, further comprising:

securing the support surface electrostatically to the substrate.

34. The method of claim 32, wherein the support surface is defined by a resilient, high friction material to secure to the substrate.