Optical switch device having movable switching member
First Claim
Patent Images
1. An optical switch provided on an optical path of an optical waveguide and which switches an advancing direction of a light passed through the optical path, said optical switch comprising:
- a movable switching member including a moving element, said switching member switching the advancing direction of the light; and
a driving member including a plurality of electrodes in proximity to, and separate from, said moving element, said moving element being opposed to said plurality of electrodes through an insulating layer, said moving element having a surface resistivity of 1010 Ω
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to 1016 Ω
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, said moving element and said plurality of electrodes oriented such that said moving element is selectively moved so that the light passed through the optical path is guided to different directions in response to a switchable voltage applied selectively to said plurality of electrodes.
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Accused Products
Abstract
Disclosed herewith is an optical switch provided on an optical path of an optical waveguide and which switches an advancing direction of a light passed through the optical path. The optical switch includes a movable switching member which switches the advancing direction of the light, and a driving member which electrostatically drives said switching member to move in an arbitrary position so that the light passed through the optical path is guided to different directions.
9 Citations
17 Claims
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1. An optical switch provided on an optical path of an optical waveguide and which switches an advancing direction of a light passed through the optical path, said optical switch comprising:
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a movable switching member including a moving element, said switching member switching the advancing direction of the light; and a driving member including a plurality of electrodes in proximity to, and separate from, said moving element, said moving element being opposed to said plurality of electrodes through an insulating layer, said moving element having a surface resistivity of 1010 Ω
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to 1016 Ω
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, said moving element and said plurality of electrodes oriented such that said moving element is selectively moved so that the light passed through the optical path is guided to different directions in response to a switchable voltage applied selectively to said plurality of electrodes. - View Dependent Claims (2, 3)
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4. An optical switch which switches an advancing direction of a light passed through an optical path of an optical waveguide, said optical switch comprising:
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a main body; an optical waveguide provided on a surface of said main body; a groove section formed on a surface of the main body so as to cross the optical waveguide; a switching member put into said groove section and including a moving element and which switches the advancing direction of the light passed through the optical path; and a plurality of electrodes provided in proximity to, and separate from, said moving element of the switching member, said moving element being opposed to said plurality of electrodes through an insulating layer, said moving element having a surface resistivity of 1010 Ω
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to 1016 Ω
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, said plurality of electrodes moving the moving element so that the light passed through the optical path is guided to different directions in response to a switchable voltage applied selectively to said plurality of electrodes. - View Dependent Claims (5, 6, 7, 8, 9)
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10. An optical switch which switches an advancing direction of a light passed through an optical path of an optical waveguide, said optical switch comprising:
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a main body; an optical waveguide provided on a surface of said main body; a groove section formed on a surface of the main body so as to cross the optical waveguide; a switching member put into said groove section and including a moving element and which switches the advancing direction of the light passed through the optical path; a plurality of electrodes provided in proximity to, and separate from, said moving element of the switching member, said plurality of electrodes moving the moving element so that the light passed through the optical path is guided to different directions in response to a switchable voltage applied selectively to said plurality of electrodes; and a plate section with electrodes provided on a surface of the main body wherein said moving element of the switching member protrudes from the groove section and said plurality of electrodes are provided so as to be opposed to the moving element.
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11. An optical switch which switches an advancing direction of a light passed through an optical path of an optical waveguide, said optical switch comprising:
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a main body; an optical waveguide provided on a surface of said main body; a groove section formed on a surface of the main body so as to cross the optical waveguide; a switching member put into said groove section and including a moving element and which switches the advancing direction of the light passed through the optical path; and a plurality of electrodes provided in proximity to, and separate from, said moving element of the switching member, said plurality of electrodes moving the moving element so that the light passed through the optical path is guided to different directions in response to a switchable voltage applied selectively to said plurality of electrodes, wherein the electrodes are made of metal films with a thickness of 1000 Å and
a width of 5 μ
m, and gaps between the electrodes are 5 μ
m.
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12. An optical switch which switches an advancing direction of a light passed through an optical path of an optical waveguide, said optical switch comprising:
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a main body; an optical waveguide provided on a surface of said main body; a groove section formed on a surface of the main body so as to cross the optical waveguide; a switching member put into said groove section and including a moving element and which switches the advancing direction of the light passed through the optical path; and a plurality of electrodes provided in proximity to, and separate from, said moving element of the switching member, said plurality of electrodes moving the moving element so that the light gassed through the optical path is guided to different directions in response to a switchable voltage applied selectively to said plurality of electrodes, wherein a different voltage is applied to at least one electrode in the plurality of the electrodes.
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13. An optical switch, said optical switch comprising:
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a moving element for changing a direction of a guided light beam; a driving member including a plurality of electrodes in proximity to, and separate from, said moving element, said plurality of electrodes moving said moving element in response to time-phased driving voltages applied to said plurality of electrodes to one of a plurality of positions such that the guided light beam is guided in at least one of a plurality of different directions; and an insulating film covering at least one of said plurality of electrodes. - View Dependent Claims (14, 15, 16)
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17. An optical switch comprising:
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a moving element for changing a direction of a guided light beam; and a driving member including a plurality of electrodes in proximity to, and separate from, said moving element, said plurality of electrodes moving said moving element in response to time-phased driving voltages applied to said plurality of electrodes to one of a plurality of positions such that the guided light beam is guided in at least one of a plurality of different directions, wherein each of the plurality of electrodes has a width of 5 μ
m and wherein a spacing between adjacent ones of said plurality of electrodes is 5 μ
m.
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Specification