Isolated resonator gyroscope with a drive and sense plate
First Claim
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1. A resonator gyroscope, comprising:
- an isolated resonator including;
a proof mass;
a counterbalancing plate having an extensive planar region; and
one or more flexures interconnecting the proof mass and counterbalancing plate;
a baseplate affixed to the resonator by the one or more flexures; and
drive and sense electrodes affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope;
wherein the isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.
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Abstract
The present invention discloses a resonator gyroscope comprising a vibrationally isolated resonator including a proof mass, a counterbalancing plate having an extensive planar region, and one or more flexures interconnecting the proof mass and counterbalancing plate. A baseplate is affixed to the resonator by the one or more flexures and sense and drive electrodes are affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope. The isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.
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Citations
26 Claims
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1. A resonator gyroscope, comprising:
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an isolated resonator including;
a proof mass;
a counterbalancing plate having an extensive planar region; and
one or more flexures interconnecting the proof mass and counterbalancing plate;
a baseplate affixed to the resonator by the one or more flexures; and
drive and sense electrodes affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope;
wherein the isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited. - View Dependent Claims (5, 6, 7, 8, 9, 10)
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2. The resonator gyroscope comprising:
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an isolated resonator including;
a proof mass;
a counterbalancing plate having an extensive planar region; and
one or more flexures interconnecting the proof mass and counterbalancing plate;
a baseplate affixed to the resonator by the one or more flexures;
a mounting frame attached to the baseplate through at least one isolation flexure; and
drive and sense electrodes affixed to the baseplate proximate to the extenstive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the pyroscope;
wherein the isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.
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3. A resonator gyroscope comprising:
- an isolated resonator including;
a proof mass;
a counterbalancing plate having an extensive planar region; and
one or more flexures interconnecting the proof mass and counterbalancing plate, wherein each of the one or more flexures in a beam flexure attached to the proof mass at a first end and the counterbalancing plate at a second end;
a baseplate affixed to the resonator by the one or more flexures; and
drive and sense electrodes affixed to the baseplate proximate to the extensive planar region of the counterbalancing for exciting the resonator and sensing movement of the gyroscope;
wherein the isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited. - View Dependent Claims (11)
- an isolated resonator including;
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4. The resonator gyroscope comprising:
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an isolated resonator including;
a proof mass, wherein the proof mass comprises a vertical protion, the vertical portion is a separate element bonded to a central plate portion, and the separate element comprises sapphire;
a counterbalancing plane having an extensive planar region; and
one or more flexures interconnecting the proof mass and counterbalancing plate;
a baseplate affixed to the resonantor by the one or more flexures; and
drive and sense electrodes affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope;
wherein the isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited. - View Dependent Claims (12, 13)
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14. A method of producing a resonator gyroscope, comprising the steps of:
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providing an isolated resonatory including;
a proof mass;
a counterbalancing plate having an extensive planar region; and
one or more flexures interconnecting the proof mass and counterbalancing plate;
affixing drive and sense electrodes to the baseplate; and
affixing the resonator to a baseplate by the one or more flexures such that the drive and sense electrodes are disposed proximate to the extensive planar region of the counterbalancing plate, wherein the sense electrodes are disposed around the periphery of the counterbalancing plate;
wherein the isolated resonatory transfers substantially no net momentum to the baseplate when the resonatory is excited. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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15. A method of producing a resonator gyroscope, comprising the steps of:
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providing an isolated resonatory including;
a proof mass;
a counterbalancing plate having an extensive planar region; and
one or more flexures interconnecting the proof mass and counterbalancing plate;
affixing drive and sense electrodes to the baseplate;
affixing the resonator to a baseplate by the oe oe more flexures such that the drive and sense electrodes are disposed proximate to the extensive planar region of the counterbalancing plate;
and providing a mounting frame attached to the baseplate through at least one isolation flexure;
wherein the isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited. separate element bonded to the central plate portion.
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16. A method of producing a resonator gyroscope, comprising the steps of:
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providing an isolated resonator including;
a proof mass;
a counterbalancing plate having an extensive planar region; and
one or more flexures interconnecting the proof mass and counterbalancing plate, wherein each of the one or more flexures is a beam flexure attached to the proof mass at a first end and the counterbalancing at a second end;
affixing drive and sense electrodes to the baseplate; and
affixing the resonator to a baseplate by the one or more flexures such that the drive and sense electrodes are disposed proximate to the extensive planar region of the counterbalancing plate;
wherein the isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited. - View Dependent Claims (24)
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17. A method of producing a resonator gyroscope, comprising the steps of:
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providing an isolated resonator including;
a proof mass, wherein the proof mass comprises a vertical portion, the vertical portion is a separate element bonded to a central plate portion, and the separate element comprises sapphire;
a counterbalancing plate having an extensive planar region; and
one or more flexures interconnecting the proof mass and counterbalancing plate;
affixing drive and sense electrodes to the baseplate; and
affixing the resonator to a baseplate by the o ne or more flexures such that the drive and sense electrodes are disposed proximate to the extensive planar region of the counterbalancing plate;
wherein the isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited. - View Dependent Claims (25, 26)
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Specification