Photoimaged channel plate for a switch

• US 7,019,235 B2
• Filed: 01/13/2003
• Issued: 03/28/2006
• Est. Priority Date: 01/13/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Casey, John F., Wong, Marvin Glenn
• Primary Examiner(s): Enad, Elvin
• Assistant Examiner(s): Klaus, Lisa
• Application Number:
  US10/341,286
• Publication Number:
  US 20040134763A1
• Time in Patent Office: 1,170 Days
• Field of Search: 200/61.47, 200/220, 200/191, 200/192, 200/224, 200/197, 200187-189, 200/199, 200/210, 200/214, 200/221, 200/222, 200226-229, 200/235, 200/236, 200/182, 200/190, 427/79
• US Class Current: 200/182
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]

Abstract

Disclosed herein is a channel plate for a fluid-based switch. The channel plate is produced by 1) depositing a photoimagable dielectric layer onto a substrate, 2) photoimaging at least one channel plate feature on the dielectric layer, and 3) developing the dielectric layer to form the at least one channel plate feature in the dielectric layer, thereby forming the channel plate. Switches using photoimaged channel plates, and a method for making a switch with a photoimaged channel plate, are also disclosed.

Claims

1. A switch, comprising:

a) a photoimaged channel plate defining at least a portion of a number of cavities, a first cavity of which is defined by a first channel formed in the photoimaged channel plate;

b) a plurality of electrodes exposed within one or more of the cavities;

c) a switching fluid, held within one or more of the cavities, that serves to open and close at least a pair of the plurality of electrodes in response to forces that are applied to the switching fluid; and

d) an actuating fluid, held within one or more of the cavities, that serves to apply said forces to the switching fluid.

2. The switch of claim 1, wherein the photoimaged channel plate comprises a plurality of dielectric layers, and wherein at least two of the dielectric layers comprise photoimaged channels defining different subsets of said number of cavities.

3. The switch of claim 1, wherein the first channel defines at least a portion of the one or more cavities that hold the switching fluid.

4. The switch of claim 3, wherein:

a) a second channel formed in the photoimaged channel plate defines at least a portion of the one or more cavities that hold the actuating fluid; and

b) a third channel formed in the photoimaged channel plate defines at least a portion of one or more cavities that connect the cavities holding the switching and actuating fluids.

5. The switch of claim 1, wherein the channels formed in the photoimaged channel plate comprise a channel that defines at least a portion of the one or more cavities that hold the switching fluid, a pair of channels that define at least a portion of the one or more cavities that hold the actuating fluid, and a pair of channels connecting corresponding ones of the channels that hold the actuating fluid to the channel that holds the switching fluid.