Deformable mirror method and apparatus including bimorph flexures and integrated drive
First Claim
1. A microelectromechanical (MEMS) structure on a substrate, comprising:
- a platform connected with a set of one or more bimorph flexures; and
the set of bimorph flexures connecting the platform with the substrate, each bimorph flexure comprising a first layer comprised of a first material and a second layer comprised of a second material, the first and second materials having particular intrinsic residual stress (IRS) characteristics and coefficients of thermal expansion (CTEs), each bimorph flexure having a curvature resulting from a first component proportional to the difference in IRS characteristics of the first and second materials and a second component proportional to the difference in CTEs of the first and second materials, the first component being larger than the second component.
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Abstract
An apparatus comprising a substrate; and a platform elevated above the substrate and supported by curved flexures. The curvature of said flexures results substantially from variations in intrinsic residual stress within said flexures. In one embodiment the apparatus is a deformable mirror exhibiting low temperature-dependence, high stroke, high control resolution, large number of degrees of freedom, reduced pin count and small form-factor. Structures and methods of fabrication are disclosed that allow the elevation of mirror segments to remain substantially constant over a wide operating temperature range. Methods are also disclosed for integrating movable mirror segments with control and sense electronics to a produce small-form-factor deformable mirror.
83 Citations
11 Claims
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1. A microelectromechanical (MEMS) structure on a substrate, comprising:
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a platform connected with a set of one or more bimorph flexures; and the set of bimorph flexures connecting the platform with the substrate, each bimorph flexure comprising a first layer comprised of a first material and a second layer comprised of a second material, the first and second materials having particular intrinsic residual stress (IRS) characteristics and coefficients of thermal expansion (CTEs), each bimorph flexure having a curvature resulting from a first component proportional to the difference in IRS characteristics of the first and second materials and a second component proportional to the difference in CTEs of the first and second materials, the first component being larger than the second component. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification