Micromirrors and hinge structures for micromirror arrays in projection displays
First Claim
Patent Images
1. A spatial light modulator, comprising:
- an array of micromirrors, each micromirror comprising a deformable hinge and a deflectable reflective mirror plate attached to the deformable hinge, wherein the mirror plate comprises a cavity in a surface of the mirror plate;
wherein a portion of the deformable hinge is disposed within the cavity at least during a rotation of the mirror plate.
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Abstract
The micromirror of the present invention comprises a mirror plate having thereon a cavity allowing deformation of a hinge attached to the mirror plate and deflection of the mirror plate in operation.
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Citations
34 Claims
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1. A spatial light modulator, comprising:
an array of micromirrors, each micromirror comprising a deformable hinge and a deflectable reflective mirror plate attached to the deformable hinge, wherein the mirror plate comprises a cavity in a surface of the mirror plate;
wherein a portion of the deformable hinge is disposed within the cavity at least during a rotation of the mirror plate.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A spatial light modulator, comprising:
an array of micromirrors, each of which comprises a deformable hinge; and
deflectable mirror plate attached to the deformable hinge, wherein the mirror plate has a reflective surface that is substantially flat without a dent, and another surface having a cavity.- View Dependent Claims (32, 33, 34)
Specification