Multilayer reflector with suppression of high order reflections
First Claim
1. A multilayer reflective film comprising a plurality of six-layer optical repeat units each comprising individual layers A, B, C, D arranged in a six-layer sequence CACDBD), or a cyclic permutation thereof, the A and B layers being optically thicker than the C and D layers, and where the individual layers have refractive indices that satisfy the relationship nA≧
- nD>
nC>
nB or the relationship nA>
nD>
nC≧
nB.
1 Assignment
0 Petitions
Accused Products
Abstract
A multilayer interference reflecting film has individual optical layers arranged to form optical repeat units throughout the film. Each of a plurality of optical repeat units has six individual layers, at least three of which have different refractive indices at a design wavelength λ0. Individual layers having nominally the same refractive index and physical thickness, arbitrarily labeled “A”, “B”, “C”, and “D”, are arranged in a six-layer optical repeat unit in a cyclic permutation of CACDBD, where the A and B layers are each thicker than the C and D layers. The thicknesses and refractive indices of the individual layers can be selected to suppress the second, third, and fourth order reflections, while reflecting light at the design wavelength.
-
Citations
13 Claims
-
1. A multilayer reflective film comprising a plurality of six-layer optical repeat units each comprising individual layers A, B, C, D arranged in a six-layer sequence CACDBD), or a cyclic permutation thereof, the A and B layers being optically thicker than the C and D layers, and where the individual layers have refractive indices that satisfy the relationship nA≧
- nD>
nC>
nB or the relationship nA>
nD>
nC≧
nB. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
- nD>
Specification