Optical waveguide structure and method for fabricating the same
First Claim
Patent Images
1. An optical waveguide structure comprising:
- a monocrystalline substrate;
an amorphous oxide material in contact with the monocrystalline substrate;
a monocrystalline metal oxide layer selected from the group consisting of alkaline earth metal titanates, alkaline earth metal zirconates, alkaline earth metal hafnates, alkaline earth metal tantalates, alkaline earth metal ruthenates, alkaline earth metal niobates, alkaline earth metal vanadates, alkaline earth metal tin-based perovskites, lanthanum aluminate, lanthanum scandium oxide, gadolinium oxide and mixtures thereof contacting the amorphous oxide material; and
an optical waveguide layer overlying said metal oxide layer,said structure further comprising a cladding layer overlying said metal oxide layer, said optical waveguide layer disposed at least partially within said cladding layer.
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Abstract
An optical waveguide structure (10) is provided. The optical waveguide structure (10) has a monocrystalline substrate (12), an amorphous interface layer (14) overlying the monocrystalline substrate (12) and an accommodating buffer layer (16) overlying the amorphous interface layer (14). An optical waveguide layer (20) overlies the accommodating buffer layer (16).
557 Citations
17 Claims
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1. An optical waveguide structure comprising:
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a monocrystalline substrate; an amorphous oxide material in contact with the monocrystalline substrate; a monocrystalline metal oxide layer selected from the group consisting of alkaline earth metal titanates, alkaline earth metal zirconates, alkaline earth metal hafnates, alkaline earth metal tantalates, alkaline earth metal ruthenates, alkaline earth metal niobates, alkaline earth metal vanadates, alkaline earth metal tin-based perovskites, lanthanum aluminate, lanthanum scandium oxide, gadolinium oxide and mixtures thereof contacting the amorphous oxide material; and an optical waveguide layer overlying said metal oxide layer, said structure further comprising a cladding layer overlying said metal oxide layer, said optical waveguide layer disposed at least partially within said cladding layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. n optical waveguide structure comprising:
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a monocrystalline substrate; an amorphous interface layer overlying said monocrystalline substrate; an accommodating buffer layer overlying said amorphous interface layer; and an optical waveguide layer overlying said accommodating buffer layer, said optical waveguide structure further comprising a cladding layer comprising one of SrTiO3, BaTiO3, SrxBa1-xTiO3, SrxZr1-xTiO3, where (0<
x<
1), PbTiO3, PbxLa1-x(ZryTi1-y)O3, where (0.7<
x<
1.0, 0<
y<
1.0), Pb(Mg1/3Nb2/3)O3, KNbO3, LiNbO3, LiTaO3, SrxBa1-xNb2O6, PbxBa1-xNb2O6, Bi4Ti3O12, Pb2KNb5O15, K3Li2Nb5O15, and substituted derivatives thereof overlying said accommodating buffer layer, said optical waveguide layer disposed at least partially within said cladding layer.
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Specification