Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method
First Claim
1. A method for manufacturing an optical micro-mirror including a fixed part and a moveable part connected to the fixed part by an articulation mechanism, the moveable part including a reflector, the method comprising:
- a) forming a stack formed of a mechanical substrate, a sacrificial layer of a specific thickness of thermal oxidation material as a first layer, and an assembly for forming the moveable part and including at least one layer of material as a second layer;
b) forming the articulation mechanism;
c) forming the moveable part by etching of at least the second layer of material to obtain at least one pattern; and
d) removing at least in part the sacrificial layer for clearing the moveable part that is then connected to a rest of the micro-mirror corresponding to the fixed part using the articulation mechanism, wherein;
the step a) of forming the stack comprises transferring onto the mechanical substrate the second layer, the substrate and/or the second layer including on their faces to be transferred a thermal oxidation layer that will form the first layer after the transferring.
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Abstract
A method for manufacturing an optical micro-mirror including a fixed part and a moveable part, with a reflection device connected to the fixed part by an articulation mechanism. This method realizes a stack including a mechanical substrate, a first layer of thermal oxidation material, and at least one second layer of material for forming the moveable part, realizes the articulation mechanism, realizes the reflection device on the second layer, realizes the moveable part by etching of at least the second layer of material, and eliminates the thermal oxidation layer to liberate the moveable part. Such an optical micro-mirror may find possible applications to optical routing or image projection systems.
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Citations
29 Claims
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1. A method for manufacturing an optical micro-mirror including a fixed part and a moveable part connected to the fixed part by an articulation mechanism, the moveable part including a reflector, the method comprising:
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a) forming a stack formed of a mechanical substrate, a sacrificial layer of a specific thickness of thermal oxidation material as a first layer, and an assembly for forming the moveable part and including at least one layer of material as a second layer; b) forming the articulation mechanism; c) forming the moveable part by etching of at least the second layer of material to obtain at least one pattern; and d) removing at least in part the sacrificial layer for clearing the moveable part that is then connected to a rest of the micro-mirror corresponding to the fixed part using the articulation mechanism, wherein; the step a) of forming the stack comprises transferring onto the mechanical substrate the second layer, the substrate and/or the second layer including on their faces to be transferred a thermal oxidation layer that will form the first layer after the transferring. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A method for manufacturing an optical micro-mirror including a fixed part and a moveable part connected to the fixed part by an articulation mechanism, the moveable part including a reflector, the method comprising:
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forming a stack comprising a mechanical substrate, a sacrificial layer of thermal oxidation material, and an assembly layer for forming the moveable part; forming the articulation mechanism; forming the moveable part by etching in the assembly layer to obtain at least one pattern; and removing at least in part the sacrificial layer for clearing the moveable part that is then connected to a rest of the micro-mirror corresponding to the fixed part using the articulation mechanism, wherein; the step of forming the stack further comprises forming at least one thermal oxidation layer on the assembly layer, wherein the step of forming the stack further comprises transferring onto the mechanical substrate said at least one thermal oxidation layer that will form the sacrificial layer after the transferring. - View Dependent Claims (26, 27, 28)
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29. A method for manufacturing an optical micro-mirror including a fixed part and a moveable part connected to the fixed part by an articulation mechanism, the moveable part including a reflector, the method comprising:
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forming a stack comprising a mechanical substrate, a sacrificial layer of a specific thickness of thermal oxidation material as a first layer, and an assembly for forming the moveable part and including at least one layer of material as a second layer; forming the articulation mechanism; forming the moveable part by etching of at least the second layer of material to obtain at least one pattern; removing at least in part the sacrificial layer for clearing the moveable part that is then connected to a rest of the micro-mirror corresponding to the fixed part using the articulation mechanism; and forming in the mechanical substrate at least one cavity facing at least one part of one of ends of the moveable part.
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Specification