Ultrasonically milled channel plate for a switch

• US 7,022,926 B2
• Filed: 12/12/2002
• Issued: 04/04/2006
• Est. Priority Date: 12/12/2002
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn
• Primary Examiner(s): Enad, Elvin
• Assistant Examiner(s): KLAUS, LISA NHUNG
• Application Number:
  US10/317,630
• Publication Number:
  US 20040112726A1
• Time in Patent Office: 1,209 Days
• Field of Search: 200182-236, 200/241, 200/243, 200/506
• US Class Current: 200/182
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: Y10T 156/1064 Partial cutting [e.g., grooving or incising]

Abstract

Disclosed herein is a switch having a channel plate and a switching fluid. The channel plate defines at least a portion of a number of cavities, a first cavity of which is defined by an ultrasonically milled channel in the channel plate. The switching fluid is held within one or more of the cavities, and is movable between at least first and second switch states in response to forces that are applied to the switching fluid. Alternate switch embodiments, and a method for making a switch, are also disclosed.

Claims

1. A switch, comprising:

a) a channel plate defining at least a portion of a number of cavities, a first cavity of which is defined by an ultrasonically milled channel in the channel plate;

b) a plurality of electrodes exposed within one or more of the cavities;

c) a switching fluid, held within one or more of the cavities, that serves to open and close at least a pair of the plurality of electrodes in response to forces that are applied to the switching fluid; and

d) an actuating fluid, held within one or more of the cavities, that serves to apply said forces to the switching fluid.

2. The switch of claim 1, wherein the ultrasonically milled channel defines at least a portion of the one or more cavities that hold the switching fluid.

3. The switch of claim 2, wherein the channel plate comprises a second ultrasonically milled channel that defines at least a portion of the one or more cavities that hold the actuating fluid.

4. The switch of claim 2, wherein the channel plate further comprises a pair of ultrasonically milled channels that define at least portions of the one or more cavities that hold the actuating fluid, and a pair of laser cut channels that define at least portions of one or more cavities that connect the cavities holding the switching and actuating fluids.

5. The switch of claim 1, wherein larger channels are ultrasonically milled in the channel plate, and wherein smaller channels are laser cut in the channel plate.

6. The switch of claim 5, wherein the larger channel plate features are defined by widths of about 200 microns or greater, and wherein the smaller channel plate features are defined by widths of about 200 microns or smaller.

7. A switch, comprising:

a) a channel plate defining at least a portion of a number of cavities, a first cavity of which is defined by an ultrasonically milled channel in the channel plate;

b) a plurality of wettable pads exposed within one or more of the cavities;

c) a switching fluid, wettable to said pads and held within one or more of the cavities, that serves to open and block light paths through one or more of the cavities in response to forces that are applied to the switching fluid; and

d) an actuating fluid, held within one or more of the cavities, that serves to apply said forces to the switching fluid.

8. The switch of claim 7, wherein the ultrasonically milled channel defines at least a portion of the one or more cavities that hold the switching fluid.

9. The switch of claim 8, wherein the channel plate comprises a second ultrasonically milled channel that defines at least a portion of the one or more cavities that hold the actuating fluid.

10. The switch of claim 8, wherein the channel plate further comprises a pair of ultrasonically milled channels that define at least portions of the one or more cavities that hold the actuating fluid, and a pair of laser cut channels that define at least portions of one or more cavities that connect the cavities holding the switching and actuating fluids.

11. The switch of claim 7, wherein larger channels are ultrasonically milled in the channel plate, and wherein smaller channels are laser cut in the channel plate.

12. The switch of claim 11, wherein the larger channel plate features are defined by widths of about 200 microns or greater, and wherein the smaller channel plate features are defined by widths of about 200 microns or smaller.

13. A switch, comprising:

a) a channel plate defining at least a portion of a number of cavities, a first cavity of which is defined by an ultrasonically milled channel in the channel plate;

b) a switching fluid, held within one or more of the cavities, that is movable between at least first and second switch states in response to forces that are applied to the switching fluid.

14. The switch of claim 13, wherein the ultrasonically milled channel defines at least a portion of the one or more cavities that hold the switching fluid.

15. The switch of claim 14, wherein a second ultrasonically milled channel in the channel plate defines at least a portion of a cavity from which said forces are applied to the switching fluid.