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Laser measurement apparatus

  • US 7,022,971 B2
  • Filed: 04/13/2004
  • Issued: 04/04/2006
  • Est. Priority Date: 05/19/2003
  • Status: Expired due to Fees
First Claim
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1. A laser measurement apparatus comprising:

  • a measuring laser beam generating means for outputting a measuring laser beam used to measure a characteristic of an object to be measured;

    an optical guiding means for controlling the direction in which the measuring laser beam travels;

    a measuring means for measuring the property of the object to be measured using the measuring laser beam returning from the object to be measured;

    a position detecting means for detecting the position of an object to be tracked; and

    a control means for controlling the optical guiding means so that the measuring laser beam is radiated to the object to be tracked based on the position of the object to be tracked detected by the position detecting means;

    whereinthe position detecting means comprises a tracking laser generating means for radiating a tracking laser beam to the object to be tracked via the optical guiding means, and an optical position sensitive detector for detecting the tracking laser beam returning via the optical guiding means from the object to be tracked; and

    the measuring means measures the property of the object to be measured using the measuring laser beam returning from the object to be measured in a state where the measuring laser beam is controlled to be radiated to the object to be measured.

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