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Biased electrostatic deflector

  • US 7,022,984 B1
  • Filed: 01/31/2005
  • Issued: 04/04/2006
  • Est. Priority Date: 01/31/2005
  • Status: Active Grant
First Claim
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1. An angular electrostatic filter comprising:

  • a top deflection plate set to a top voltage extending from an entrance side to an exit side, wherein the top deflection plate is planar;

    a bottom deflection plate wherein at least a portion is substantially parallel to the top deflection plate and at least a portion is angled with respect to the top deflection plate, extending from the entrance side to the exit side, and set to a bottom voltage, wherein the bottom voltage is more negative than the top voltage, and wherein an electric field is generated between the top deflection plate and the bottom deflection plate;

    an entrance electrode positioned at the entrance side of the filter and set to a first focus voltage; and

    an exit electrode positioned at the exit side of the filter, wherein the exit electrode is set to a second focus voltage.

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