Apparatus for forming nano-grating device

• US 7,023,593 B2
• Filed: 03/17/2004
• Issued: 04/04/2006
• Est. Priority Date: 11/28/2003
• Status: Expired due to Fees

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Lu, Ying-Tsung, Lai, Pong, Chen, Yung-Hsin, Tyan, Wann-Ding
• Primary Examiner(s): Assaf, Fayez G.
• Application Number:
  US10/801,526
• Publication Number:
  US 20050117187A1
• Time in Patent Office: 748 Days
• Field of Search: 359/35, 359/30, 359/34, 359/12, 359/1, 359/558, 359/566
• US Class Current: 359/35
• CPC Class Codes: B01D 39/12 of wire gauze; of knitted wire; of expanded metal
• CPC Class Codes: B01D 39/1692 Other shaped material, e.g. perforated or porous sheets
• CPC Class Codes: G02B 5/1809 with pitch less than or comparable to the wavelength
• CPC Class Codes: G03F 7/70408 Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
• CPC Class Codes: G03H 2001/0497 Dot matrix holograms

Abstract

An apparatus for forming a nano grating device to film nano-scale interference fringes by holography in order to makes a nano-scale meshed structure is disclosed. A beam emitted form a light source passes subsequently through a beam splitter and two reflectors to reach at symmetrically mounted light emitting modules. The light emitting modules generate two beams passing along the same optical paths and then projecting on a photosensitive substrate that is attached on a hemi-sphere lens. Thus, a first set of interference fringes are formed. Then, the substrate rotates with an angle and then is subjected to exposure to form a second set of interference fringes crossing the first set of interference fringes. Thereby, a nano-scale meshed structure is obtained.

Claims

1. An apparatus for forming a nano grating device, comprising:

a light source, used to emit a first beam;

a beam splitter, mounted on one side of the light source to split the first beam emitted from the light source into two second beams;

two reflectors, mounted on the other side of the splitter opposite to the light source to respectively receive the second beams generated by the light splitter and then reflect a third beam;

two light emitting modules, mounted on the other side of the reflectors opposite to the light splitter to respectively receive the third beams from the reflectors and generate a fourth beam; and

a hemi-sphere lens, having a flat surface and being mounted on the other side of the light emitting modules opposite to the reflectors, a photosensitive substrate is attached onto the flat surface, and each of the fourth beam travels along the same optical paths to reach the photosensitive substrate that is later exposed to form a grating structure;

wherein after the grating structure is formed on the photosensitive substrate, rotating and exposing the photosensitive substrate to form another grating structure crossing the grating structure that constructs a filter.

2. The apparatus of claim 1, wherein the light source is a laser.

3. The apparatus of claim 1, wherein the beam splitter is an optical fiber for splitting the first beam into two beams.

4. The apparatus of claim 1, wherein the light emitting modules respectively include an amplifying object lens, a filtering pinhole and a lens, the third beams pass subsequently through the amplifying object lens, a filter pinhole and the lens to respectively form a fourth beam.

5. The apparatus of claim 1, wherein the two light emitting modules are symmetrically mounted at either sides of the hemi-sphere lens to allow the fourth beams to travel the same optical paths and then project on the photosensitive substrate.

6. The apparatus of claim 1, further comprising a movable platform to move the photosensitive substrate.