Gating apparatus and method of manufacture
First Claim
1. An apparatus for controlling the flow of gases, fluids and mixed phase fluids, the apparatus comprising:
- an upper structure having an elastically deformable lever region and a polished central region; and
a lower structure having a polished surface facing the upper structure;
a fulcrum structure disposed between the upper structure and the lower structure such that the fulcrum structure acts as a fulcrum about which the upper structure can be elastically deformed, to cause said upper structure central region to separate from the lower structure surface; and
a deflection mechanism, wherein the deflection mechanism provides a deflection force upon the upper structure proximate the lever region and in a direction essentially perpendicular to the upper structure so as to bend the upper structure about the fulcrum structure.
1 Assignment
0 Petitions
Accused Products
Abstract
A gating apparatus for controlling the gap between two surfaces that includes an upper structure having a polished central region portion, an elastically deformable fulcrum structure, and an elastically deformable lever region. The upper structure can be fabricated from silicon using microelectromechanical system (MEMS) fabrication techniques. The gating apparatus also includes a lower structure coupled to the upper structure at the elastically deformable fulcrum structure. The upper structure, in response to a force, can bend about the fulcrum structure, thereby forming a variable gap between the polished central region portion and the lower structure. The variable gap can be used as a filter to filter fluids and mixed phase fluids. The structures can be made from a wide variety of materials including silicon, glass, ceramic, metal, and plastic.
101 Citations
39 Claims
-
1. An apparatus for controlling the flow of gases, fluids and mixed phase fluids, the apparatus comprising:
-
an upper structure having an elastically deformable lever region and a polished central region; and a lower structure having a polished surface facing the upper structure; a fulcrum structure disposed between the upper structure and the lower structure such that the fulcrum structure acts as a fulcrum about which the upper structure can be elastically deformed, to cause said upper structure central region to separate from the lower structure surface; and a deflection mechanism, wherein the deflection mechanism provides a deflection force upon the upper structure proximate the lever region and in a direction essentially perpendicular to the upper structure so as to bend the upper structure about the fulcrum structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
-
Specification