Electromagnetic radiation detectors having a microelectromechanical shutter device

• US 7,026,602 B2
• Filed: 05/29/2003
• Issued: 04/11/2006
• Est. Priority Date: 04/13/2001
• Status: Expired due to Fees

• Current Assignee: MCNC, Inc., Micross Advanced Interconnect Technology LLC
• Original Assignee: Research Triangle Institute
• Inventors: Dausch, David E.
• Primary Examiner(s): Le, Que T.
• Application Number:
  US10/447,620
• Publication Number:
  US 20040046123A1
• Time in Patent Office: 1,048 Days
• Field of Search: 250/226, 250/237.R, 250/232, 250/214.1, 359/248, 359/254, 359/207, 359/230, 361/174, 361/196, 361/198
• US Class Current: 250/226
• CPC Class Codes: B81B 3/0035 Constitution or structural means for controlling the movement of the flexible or deformable elements
• CPC Class Codes: G02B 26/04 by periodically varying the intensity of light, e.g. using choppers shutters, diaphragms for cameras G03B9/00; devices for eliminating or reducing the effect of flicker in projection systems G03B21/40
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/0866 the reflecting means being moved or deformed by thermal means

Abstract

The present invention provides for an improved electromagnetic radiation detector having a micromachined electrostatic chopper/shutter device. The MEMS flexible film chopper/shutter device provides reliability, efficiency, noise reduction and temperature fluctuation compensation capabilities to the associated electromagnetic radiation detector. An electromagnetic radiation detector having an electrostatic chopper/shutter device includes a detector material element and flexible film actuator overlying the detector material layer and moveable relative thereto. The flexible film actuator will typically include an electrode element and a biasing element such that the actuator remains in a fully curled, open state absent electrostatic voltage and moves to a fully uncurled, closed state upon the application of electrostatic voltage. Arrays that incorporate a plurality of electromagnetic radiation detectors and/or electrostatic shuttering devices are additionally provided for.

Claims

1. An electromagnetic radiation detector device having microelectromechanical system (MEMS) shutter, comprising:

a detector; and

a flexible film actuator overlying said detector and moveable relative thereto to alternately allow passage of electromagnetic radiation to said detector and block passage of radiation to said detector.

2. The device of claim 1, further comprising a transparent substrate that supports the detector and that is disposed between the flexible film actuator and the detector.

3. The device of claim 1, wherein the flexible film actuator comprises an underlying transparent electrode disposed between the flexible film actuator and the detector;

and

further comprises an electrode element and a biasing element, the actuator having a fixed portion attached to an underlying surface and a distal portion moveable relative to the underlying transparent electrode.

4. The device of claim 3, further comprising a transparent dielectric element disposed between the electrode element and the underlying transparent electrode.

5. The device of claim 1, further comprising an anti-reflection element disposed between the detector and the flexible film actuator.

6. The device of claim 1, wherein the detector comprises a photo-detector.

7. The device of claim 6, wherein the photo-detector comprises at least one of a photovoltaic detector element and a photoconductive detector element.

8. The device of claim 6, wherein the photo-detector comprises a quantum well infrared photo-detector element.

9. The device of claim 6, wherein the photo-detector further comprises a semiconductor material having a doped region.

10. The device of claim 9, wherein the semiconductor material comprises at least one of silicon, germanium, mercury-cadmium-tellurium (HgCdTe), indium antimonide (InSb), III–

V compound semiconductors and II–

V compound semiconductors.

34. The device of claim 2, wherein the detector is disposed on a side of the transparent substrate opposite the actuator.

38. The device of claim 1, wherein the detector comprises an infrared detector detector.

39. The device of claim 38, wherein the infrared detector comprises at least one of a pyroelectric detector and a bolometer.

40. The device of claim 38, wherein the infrared detector comprises:

a material including at least one of lead zirconate titanate (PZT), lithium tantalate (LiTaO₃), lead titanium oxide (PbTiO₃), barium strontium titanate (BST), polyvinylidene fluoride (PVDF) and vanadium oxide.

11. An electromagnetic radiation detector device having MEMS shutter, the device comprising:

a first transparent substrate;

a flexible film actuator disposed on the first transparent substrate;

a second substrate;

a detector disposed on the second substrate; and

one or more solder bumps that serve to connect the first transparent substrate to the second substrate.

12. The device of claim 11, wherein the flexible film actuator further comprises:

an underlying fixed transparent electrode disposed between the flexible film actuator and the first transparent substrate; and

a flexible electrode element and a biasing element, the actuator having a fixed portion attached to an underlying surface and a distal portion moveable relative to the underlying fixed transparent electrode.

13. The device of claim 12, further comprising a transparent dielectric element disposed between the flexible electrode element and the underlying fixed transparent electrode.

14. The device of claim 11, further comprising an anti-reflection element disposed between the detector and the flexible film actuator.

15. The device of claim 11, wherein the detector comprises a photo-detector.

16. The device of claim 15, wherein the photo-detector comprises at least one of a photovoltaic detector element and a photoconductive detector element.

17. The device of claim 15, wherein the photo-detector comprises a quantum well infrared photo-detector element.

18. The device of claim 15, wherein the photo-detector element further comprises a semiconductor material having a doped region.

19. The device of claim 18, wherein the semiconductor material comprises at least one of silicon, germanium, mercury-cadmium-tellurium (HgCdTe), indium antimonide (InSb), III–

V compound semiconductors and II–

V compound semiconductors.

35. The device of claim 11, wherein the detector is disposed on a side of the second transparent substrate opposite the actuator.

41. The device of claim 11, wherein the detector comprises an infrared detector detector.

42. The device of claim 41, wherein the infrared detector comprises at least one of a pyroelectric detector and a bolometer.

43. The device of claim 41, wherein the infrared detector comprises:

a material including at least one of lead zirconate titanate (PZT), lithium tantalate (LiTaO₃), lead titanium oxide (PbTiO₃), barium strontium titanate (BST), polyvinylidene fluoride (PVDF) and vanadium oxide.

20. An electromagnetic radiation detector array having microelectromechanical system (MEMS) shutter array, comprising:

a substrate; and

a plurality of detector pixels supported by said substrate, said detector pixels comprising,

a detector, and

a flexible film actuator overlying said detector and moveable relative thereto to alternately allow passage of electromagnetic radiation to said detector and block passage of radiation to said detector.

21. The detector array of claim 20, wherein the substrate further comprises a silicon substrate having a read-out circuit disposed thereon.

22. The detector array of claim 20, wherein the plurality of flexible film actuators further comprise a flexible electrode, a biasing element, and a transparent electrode for a corresponding detector pixel, each actuator having a fixed portion attached to an underlying surface and a distal portion moveable relative to the transparent electrode.

23. The detector array of claim 20, wherein the detector comprises a photo-detector.

24. The detector array of claim 23, wherein the photo-detector comprises at least one of a photovoltaic layer and a photoconductive detector layer.

25. The detector array of claim 24, wherein the photo-detector comprises a quantum well infrared photo-detector layer.

26. The detector array of claim 24, wherein the photo-detector further comprises a semiconductor material having a doped region.

27. The detector array of claim 26, wherein the semiconductor material comprises at least one of silicon, germanium, mercury-cadmium-tellurium (HgCdTe), III–

V compound semiconductors and II–

V compound semiconductors.

36. The detector array of claim 20, wherein the substrate comprises a transparent substrate and the plurality of detector pixels are disposed on a side of the transparent substrate opposite the flexible film actuator.

44. The detector array of claim 20, wherein the detector comprises an infrared detector.

45. The device of claim 44, wherein the infrared detector comprises at least one of a pyroelectric detector and a bolometer.

46. The detector array of claim 20, wherein the infrared detector comprises:

a material including at least one of lead zirconate titanate (PZT), lithium tantalate (LiTaO₃), lead titanium oxide (PbTiO₃), barium strontium titanate (BST), polyvinylidene fluoride (PVDF) and vanadium oxide.

28. A method for pixel modulation in an electromagnetic radiation detector array, the method comprising:

providing for a plurality of flexible film actuators, each actuator corresponding to one or more detector pixels in an electromagnetic radiation detector array;

shuttering one or more flexible film actuators to allow passage of electromagnetic radiation to the one or more detector pixels corresponding to the flexible film actuator;

detecting the electromagnetic radiation in the one or more detector pixels as a result of the shuttering of the corresponding flexible film actuator;

generating charge carriers in the one or more detector pixels in response to the electromagnetic radiation; and

generating a read-out signal as a result of the charge carriers in the one or more detector pixels.

29. The method of claim 28, wherein the step of shuttering one or more flexible film actuators comprises:

deactivating, by releasing the electrostatic force, one or more flexible film actuators to allow passage of electromagnetic radiation to the corresponding one or more detector pixels.

30. The method of claim 28, wherein the step of generating a read-out signal further comprises:

generating a read-out voltage signal.

31. The method of claim 28, wherein the step of generating a read-out signal further comprises:

generating a read-out current value.

32. The method of claim 28, wherein the step of shuttering of the one or more flexible film actuators provides intermittent open (on) or blocked (off) states in the one or more photo-detector pixels.

33. The method of claim 28, wherein the step of shuttering comprises:

chopping of the incident electromagnetic radiation at a continuous frequency to the one or more detector pixels.

37. The method of claim 28, wherein the step of shuttering comprises:

opening one or more flexible film actuators to allow passage of electromagnetic radiation through a transparent substrate to the one or more detector pixels disposed on a side of transparent substrate opposite the flexible film actuators.