Scatterometry alignment for imprint lithography

• US 7,027,156 B2
• Filed: 08/01/2002
• Issued: 04/11/2006
• Est. Priority Date: 08/01/2002
• Status: Expired due to Fees

• Current Assignee: Mii Newco, Inc.
• Original Assignee: Molecular Imprints, Inc. (Canon Inc.)
• Inventors: Watts, Michael P. C., McMackin, Ian
• Primary Examiner(s): Lee, Hwa (Andrew)
• Assistant Examiner(s): Stock, Jr., Gordon J.
• Application Number:
  US10/210,785
• Publication Number:
  US 20040021866A1
• Time in Patent Office: 1,349 Days
• Field of Search: 356399-401, 356/614, 430/5, 430/22, 430/30, 355/53, 355/55, 355/77, 250/548
• US Class Current: 356/401
• CPC Class Codes: B29C 2035/0827 using UV radiation
• CPC Class Codes: B29C 35/0888 using transparant moulds
• CPC Class Codes: B29C 59/022 characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
• CPC Class Codes: B29C 59/026 of layered or coated substantially flat surfaces
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 9/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00

Abstract

Described are methods for patterning a substrate by imprint lithography. Imprint lithography is a process in which a liquid is dispensed onto a substrate. A template is brought into contact with the liquid and the liquid is cured. The cured liquid includes an imprint of any patterns formed in the template. Alignment of the template with a previously formed layer on a substrate, in one embodiment, is accomplished by using scatterometry.

Claims

1. A method of aligning a template with a portion of a substrate, comprising:

placing a patterned template at a spaced relation to a substrate, wherein the patterned template comprises a template alignment mark, and wherein the substrate comprises a substrate alignment mark, and wherein the template alignment mark and the substrate alignment mark are grating structures;

illuminating the template alignment mark and the substrate alignment mark with light at an angle that is substantially normal to a plane defined by the substrate;

measuring light at a first wavelength reflected from the template alignment mark and the substrate alignment mark at a non-zero order with a light detector;

determining a first alignment error of the template alignment mark with respect to the substrate alignment mark based on light measurements collected at the first wavelength of light;

measuring light at a second wavelength reflected from the template alignment mark and the substrate alignment mark at a non-zero order with the light detector;

determining a second alignment error of the template alignment mark with respect to the substrate alignment mark based on light measurements collected at the second wavelength of light with the light detector;

determining an average alignment error, wherein the average alignment error is a function of the first and second alignment errors; and

altering the position of the patterned template with respect to the substrate to compensate for the alignment error.

2. The method of claim 1, wherein the template alignment mark and the substrate alignment mark each comprise a grating having a spacing of between 1 μ

m to 3 μ

m.

3. The method of claim 1, wherein the template alignment mark and the substrate alignment mark each comprise a grating having a spacing of less than 1 μ

m.

4. The method of claim 1, wherein the template alignment mark and the substrate alignment mark each comprise a grating having a spacing between 100 and 1000 nm.

5. The method of claim 1, wherein the template alignment mark and the substrate alignment mark each comprise a first grating having a spacing of between 1 μ

m to 3 μ

m and a second grating having a spacing between 100 and 1000 nm.

6. The method of claim 1, wherein the template alignment mark and the substrate alignment mark each comprise a first axis grating and a second axis grating, wherein the first axis grating is perpendicular to the second axis grating.

7. The method of claim 1, wherein measuring light at the first wavelength and measuring light at the second wavelength comprises using an array detector.

8. The method of claim 1, wherein measuring light at the first wavelength and measuring light at the second wavelength comprises using an array detector, wherein the array detector has a resolution capable of resolving different wavelengths of light reflected at the non-zero order.

9. The method of claim 1, wherein measuring light at the first wavelength and measuring light at the second wavelength comprises using a spectrophotometer.

10. The method of claim 1, wherein measuring light at the first wavelength and measuring light at the second wavelength comprises measuring the +1 and −

1 order of the reflected light.

11. The method of claim 1, wherein measuring light at the first wavelength and measuring light at the second wavelength comprises using non achromatic lens coupled to an array detector.

12. The method of claim 1, wherein the first alignment error is calculated by comparing the positive n order light measurements at the first wavelength to the negative n order light measurements at the first wavelength, and wherein the second alignment error is calculated by comparing the positive n order light measurements at the second wavelength to the negative n order light measurements at the second wavelength, wherein the n order is any order of light greater than zero.

13. A method of aligning a template with a portion of a substrate, comprising:

placing a patterned template at a spaced relation to a substrate, wherein the patterned template comprises a template alignment mark, and wherein the substrate comprises a substrate alignment mark, and wherein the template alignment mark and the substrate alignment mark are grating structures;

illuminating the template alignment mark and the substrate alignment mark with two incident light beams, wherein both of the incident light beams are directed at an angle that is substantially non-normal to a plane defined by the substrate;

measuring zero order light from both of the incident light beams at a first wavelength of light with a light detector;

determining a first alignment error of the template alignment mark with respect to the substrate alignment mark based on light measurements collected from both beams of light at the first wavelength of light;

measuring zero order light from both of the incident light beams at a second wavelength of light with the light detector;

determining a second alignment error of the template alignment mark with respect to the substrate alignment mark based on light measurements collected from both beams of light at the first wavelength of light;

determining an average alignment error, wherein the average alignment error is a function of the first and second alignment errors; and

altering the position of the patterned template with respect to the substrate to compensate for the alignment error.

14. A method of aligning a template with a portion of a substrate, comprising:

placing a patterned template at a spaced relation to a substrate, wherein the patterned template comprises a template alignment mark, and wherein the substrate comprises a substrate alignment mark, and wherein the template alignment mark and the substrate alignment mark are grating structures;

illuminating the template alignment mark and the substrate alignment mark with two incident light beams, wherein both of the incident light beams are directed at an angle that is substantially non-normal to a plane defined by the substrate;

measuring non-zero order light from both of the incident light beams at a first wavelength of light with a light detector;

determining a first alignment error of the template alignment mark with respect to the substrate alignment mark based on light measurements collected from both beams of light at the first wavelength of light;

measuring non-zero order light from both of the incident light beams at a second wavelength of light with the light detector;

determining a second alignment error of the template alignment mark with respect to the substrate alignment mark based on light measurements collected from both beams of light at the first wavelength of light;

determining an average alignment error, wherein the average alignment error is a function of the first and second alignment errors; and

altering the position of the patterned template with respect to the substrate to compensate for the alignment error.

15. A method of forming a pattern on a substrate comprising:

applying a predetermined volume of an activating light curable liquid to a first portion of the substrate in a predetermined pattern;

placing a patterned template at a spaced relation to the substrate, wherein the patterned template comprises a template alignment mark, and wherein the substrate comprises a substrate alignment mark, and wherein the template alignment mark and the substrate alignment mark are grating structures, and wherein a portion of the patterned template contacts the activating light curable liquid disposed on the substrate;

illuminating the template alignment mark and the substrate alignment mark with light at an angle that is substantially normal to a plane defined by the substrate;

measuring light at a first wavelength reflected from the template alignment mark and the substrate alignment mark at a non-zero order with a light detector;

determining a first alignment error of the template alignment mark with respect to the substrate alignment mark based on light measurements collected at the first wavelength of light;

measuring light at a second wavelength reflected from the template alignment mark and the substrate alignment mark at a non-zero order with the light detector;

determining a second alignment error of the template alignment mark with respect to the substrate alignment mark based on light measurements collected at the second wavelength of light;

determining an average alignment error, wherein the average alignment error is a function of the first and second alignment errors;

altering a position of the patterned template with respect to the substrate to compensate for the alignment error;

applying activating light to the activating light curable liquid, wherein the application of the activating light substantially cures the activating light curable liquid, forming a first patterned area; and

separating the patterned template from the cured liquid.

16. The method of claim 15, wherein the activating light curable liquid is substantially absent from a region between the substrate alignment mark and the template alignment mark.

17. The method of claim 15, wherein the patterned template comprises a first surface and a plurality of recesses formed in one or more patterning area of the patterned template extending from the first surface toward a second surface of the patterned template, where the plurality of recesses define a plurality of features in the first surface of the patterned template.

18. The method of claim 17, wherein the patterned template comprises a border formed about a perimeter of one or more of the patterning areas, wherein a depth of the border is greater than a depth of the plurality of recesses.

19. The method of claim 15, wherein the patterned template comprises two or more patterning areas, each of the patterning areas comprising a plurality of recesses, and wherein the two or more patterning areas are separated from each other by a channel, and wherein a depth of the channel is greater than a depth of the plurality of recesses in the patterning areas.

20. The method of claim 15, wherein separating the patterned template from the cured liquid comprises moving the patterned template and substrate into a substantially non-parallel orientation with respect to one another;

and moving the patterned template and the substrate apart from one another.

21. The method of claim 15, further comprising applying separating light before separating the patterned template from the cured liquid, wherein the separating light alters a chemical composition of a portion of the cured liquid such that the adhesion of the patterned template to the cured liquid is reduced.

22. The method of claim 15, further comprising applying separating light before separating the patterned template from the cured liquid, wherein the separating light alters a chemical composition of a portion of the cured liquid such that a gas is released by the cured liquid near an interface of the patterned template and the cured liquid.

23. The method of claim 15, further comprising providing an enclosure around at least the patterned template and the substrate and inhibiting temperature variations greater than 1.0°

C. within at least a portion of the enclosure.

24. The method of claim 15, further comprising applying a transfer layer to the substrate before applying the predetermined volume of the activating light curable liquid to the first portion of the substrate, wherein the transfer layer is etched at a different rate than an etch rate of the cured liquid under the same etching conditions.

25. The method of claim 15, wherein the activating light curable liquid has a viscosity of less than 30 centipoise measured at 25°

C.

26. The method of claim 15, wherein at least a portion of the first surface of the patterned template comprises a surface treatment layer.

27. The method of claim 15, wherein applying the activating light curable liquid to a portion of the substrate comprises dispensing the liquid with a fluid dispenser.

28. The method of claim 15, wherein the activating light curable liquid comprises an ultraviolet light curable composition.

29. The method of claim 15, wherein positioning the patterned template and the substrate in a spaced relationship comprises positioning the patterned template at a distance of less than 500 nm from the substrate.

30. A method of forming a pattern on a substrate comprising:

applying a predetermined volume of an activating light curable liquid to a first portion of the substrate in a predetermined pattern;

placing a patterned template at a spaced relation to the substrate, wherein the patterned template comprises a template alignment mark, and wherein the substrate comprises a substrate alignment mark, and wherein the template alignment mark and the substrate alignment mark are grating structures, and wherein a portion of the patterned template contacts the activating light curable liquid disposed on the substrate;

illuminating the template alignment mark and the substrate alignment mark with two incident light beams, wherein both of the incident light beams are directed at an angle that is substantially non-normal to a plane defined by the substrate;

measuring zero order light from both of the incident light beams at a first wavelength of light with a light detector;

determining a first alignment error of the patterned template alignment mark with respect to the substrate alignment mark based on light measurements collected from both beams of light at the first wavelength of light;

measuring zero order light from both of the incident light beams at a second wavelength of light with the light detector;

determining a second alignment error of the template alignment mark with respect to the substrate alignment mark based on light measurements collected from both beams of light at the first wavelength of light;

determining an average alignment error, wherein the average alignment error is a function of the first and second alignment errors;

altering a position of the patterned template with respect to the substrate to compensate for the alignment error;

applying activating light to the activating light curable liquid, wherein the application of activating light substantially cures the activating light curable liquid, forming a first patterned area; and

separating the patterned template from the cured liquid.

31. A method of forming a pattern on a substrate comprising:

applying a predetermined volume of an activating light curable liquid to a first portion of the substrate in a predetermined pattern;

placing a patterned template at a spaced relation to the substrate, wherein the patterned template comprises a template alignment mark, and wherein the substrate comprises a substrate alignment mark, and wherein the template alignment mark and the substrate alignment mark are grating structures, and wherein a portion of the template contacts the activating light curable liquid disposed on the substrate;

illuminating the template alignment mark and the substrate alignment mark with two incident light beams, wherein both of the incident light beams are directed at an angle that is substantially non-normal to a plane defined by the substrate;

measuring non-zero order light from both of the incident light beams at a first wavelength of light with a light detector;

determining a first alignment error of the template alignment mark with respect to the substrate alignment mark based on light measurements collected from both beams of light at the first wavelength of light;

measuring non-zero order light from both of the incident light beams at a second wavelength of light with the light detector;

determining a second alignment error of the template alignment mark with respect to the substrate alignment mark based on light measurements collected from both beams of light at the first wavelength of light;

determining an average alignment error, wherein the average alignment error is a function of the first and second alignment errors;

altering a position of the patterned template with respect to the substrate to compensate for the alignment error;

applying activating light to the activating light curable liquid, wherein the application of activating light substantially cures the activating light curable liquid, forming a first patterned area; and

separating the patterned template from the cured liquid.