High-density spatial light modulator
First Claim
Patent Images
1. A MEMS spatial light modulator comprising:
- a substrate having a reflective surface; and
a ribbon, having end supports but no side supports, configured over the reflective surface of the substrate, the ribbon comprising an elongated flat member with a reflective surface, the member spanning a length over a cavity of the substrate and having one or more openings in a middle portion, the opening(s) allowing light to pass through and impinge on the reflective surface of the substrate,wherein the ribbon is deflectable towards the substrate to diffract incident light in a controllable manner.
1 Assignment
0 Petitions
Accused Products
Abstract
In one embodiment, a high-density spatial light modulator includes a substrate having a reflective surface and a reflective ribbon over the reflective surface. The ribbon may have one or more openings, such as rectangular slots. The openings allow light to pass through the ribbon and impinge on the reflective surface. Deflecting the ribbon towards the substrate thus allows for dynamically-controllable diffraction of incident light. The spatial light modulator pixel requires less space than a conventional light modulator, thus allowing for relatively large pixel count within a manufacturable device size. Other embodiments are also disclosed.
-
Citations
21 Claims
-
1. A MEMS spatial light modulator comprising:
-
a substrate having a reflective surface; and a ribbon, having end supports but no side supports, configured over the reflective surface of the substrate, the ribbon comprising an elongated flat member with a reflective surface, the member spanning a length over a cavity of the substrate and having one or more openings in a middle portion, the opening(s) allowing light to pass through and impinge on the reflective surface of the substrate, wherein the ribbon is deflectable towards the substrate to diffract incident light in a controllable manner. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. A high-density spatial light modulator comprising:
-
a substrate; an array of deflectable ribbon devices, having end supports but not side supports, configured above the substrate and spanning a length across a cavity on the substrate; one or more openings within each ribbon device; an opening between adjacent ribbon devices; a reflective layer on each ribbon device, a reflective layer on the substrate configured at least beneath said openings; and wherein the spatial light modulator is configured such that area-reflectivity products of a) the reflective layer on the ribbons and b) the openings within and between the ribbons to the reflective layer on the substrate, are approximately equal. - View Dependent Claims (16, 17, 18, 19)
-
-
20. A method of spatially modulating light, the method comprising:
-
impinging light of a wavelength upon an array of ribbon devices, having end supports but no side supports, over a substrate; and controllably deflecting the ribbon devices, wherein the substrate comprises a reflective surface, and wherein each ribbon device comprises a reflective surface and further comprises one or more openings in a middle portion to allow light to pass through to the reflective surface of the substrate. - View Dependent Claims (21)
-
Specification