Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
First Claim
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1. A spatial light modulator, comprising:
- a glass substrate that is transmissive to visible light;
a silicon substrate;
wherein the silicon substrate and the substrate that is transmissive to visible light are bonded together forming a gap between the substrates; and
a plurality of deflectable elements enclosed within the gap;
wherein each deflectable element comprises an ON and OFF state such that light beams reflected from the ON and OFF states both travel back through the light transmissive substrate at different angles.
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Abstract
A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.
107 Citations
48 Claims
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1. A spatial light modulator, comprising:
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a glass substrate that is transmissive to visible light; a silicon substrate; wherein the silicon substrate and the substrate that is transmissive to visible light are bonded together forming a gap between the substrates; and a plurality of deflectable elements enclosed within the gap;
wherein each deflectable element comprises an ON and OFF state such that light beams reflected from the ON and OFF states both travel back through the light transmissive substrate at different angles. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A spatial light modulator, comprising:
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a substrate that is transmissive to visible light; a silicon substrate; wherein the silicon substrate and the substrate that is transmissive to visible light are bonded together with a spacer therebetween forming a gap between the substrates; and a plurality of deflectable elements encapsulated within the gap, wherein each deflectable element comprises an ON and OFF state such that light beams reflected from the ON and OFF states both travel back through the light transmissive substrate at different angles. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48)
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Specification