Determining batch start versus delay

• US 7,027,885 B1
• Filed: 12/30/2002
• Issued: 04/11/2006
• Est. Priority Date: 12/30/2002
• Status: Expired due to Fees

• Current Assignee: GlobalFoundries, Inc., KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Li, Yiwei, Parunak, H. Van Dyke, Barto, Larry D., Mata, Gustavo, Nettles, Steven C.
• Primary Examiner(s): Gandhi, Jayprakash N.
• Assistant Examiner(s): Rapp, Chad
• Application Number:
  US10/331,598
• Time in Patent Office: 1,198 Days
• Field of Search: 700/28, 700/36, 700/95, 700/96, 700/99, 700100-104, 700/121, 705/8, 705/9
• US Class Current: 700/99
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
• CPC Class Codes: G06Q 50/04 Manufacturing
• CPC Class Codes: Y02P 90/30 Computing systems specially adapted for manufacturing
• CPC Class Codes: Y02P 90/80 Management or planning

Abstract

The invention is a technique by which a manufacturing process flow determines when to begin processing a batch of lots. The invention includes a method for determining whether to begin processing a batch in one aspect and a manufacturing process flow in a second aspect. The method comprises: ascertaining a respective time at which each of a plurality of additional lots will be received into the batch, the batch including a plurality of present lots; assessing a cost for a machine, each additional lot, and each present lot for each respective time at which each additional lot will be received should the machine begin processing the batch at the respective time; and determining the respective time at which the total cost borne by the machine, each additional lot, and each present lot will be at a minimum. The manufacturing process flow comprises a processing tool that processes batch-by-batch, a batch of present lots, a plurality of additional lots that may be included in the batch, and a software agent or a computing system. The software agent/computing system is capable of performing the method set forth above.

Claims

1. A method for determining whether to delay processing a batch, the method comprising:

ascertaining a respective time at which each of a plurality of additional lots will be received into the batch, the batch including a plurality of present lots;

assessing a cost for a machine, each additional lot, and each present lot for each respective time at which each additional lot will be received should the machine begin processing the batch at the respective time; and

determining the respective time at which the total cost borne by the machine, each additional lot, and each present lot will be at a minimum.

2. The method of claim 1, wherein there is a future batch scheduled for the machine and assessing a cost for each present lot for each respective time at which each additional lot could be received includes assessing the cost for each lot in the future batch.

3. The method of claim 1, wherein assessing the cost for the machine at each respective time includes assessing a cost for waiting until the respective time and a cost for processing at the respective time.

4. The method of claim 3, wherein assessing the cost for waiting and the cost for processing at the respective time includes assessing a cost per unit time.

5. The method of claim 4, wherein assessing the opportunity cost per unit time is a function of the utilization of the machine within a time window, the planned utilization of a bottleneck machine, and the value of the factory output per unit time.

6. The method of claim 3, wherein assessing the cost for processing at the respective time is a function of the change in the batch size, the time duration for running a batch, the average batch size, and the opportunity cost per unit time.

7. The method of claim 1, wherein assessing a cost for a lot at a respective time is a function of a decreasing convex cost of lateness function, a lot budget, and a cost of lateness factor.

8. The method of claim 1, further comprising iterating the determination of when to begin processing.

9. A method for determining whether to begin processing a batch, the method comprising:

ascertaining a time t_i at which each of N lots L_i will become available, where 1≦

i≦

N;

assessing a cost borne by a machine at each time t_i should the machine begin processing the batch at the respective time t_i;

assessing a cost borne by each of the lots L_i at each time t_i should the machine begin processing the batch at the respective time t_i;

assessing a cost borne by each of a plurality of lots L_x originally in the batch at each time t_i should the machine begin processing the batch at the respective time t_i; and

determining the time t_i at which the total cost borne by the machine, by the lots L_i, and by the lots L_x is least.

10. The method of claim 9, further comprising assessing a cost for each lot Li in a future batch on the machine at each respective time at which each additional lot could be received in a current batch and adding these costs to the total cost when determining the respective time when the total cost will be a minimum.

11. The method of claim 9, wherein assessing the cost for the machine at each t_i includes assessing a cost for waiting until the t_i and a cost for processing at the t_i.

12. The method of claim 11, wherein assessing the cost for waiting and the cost for processing at the time t_i includes assessing a cost per unit time.

13. The method of claim 12, wherein assessing the opportunity cost per unit time is a function of the utilization of the machine within a time window, the planned utilization of a bottleneck machine, and the value of the factory output per unit time.

14. The method of claim 11, wherein assessing the cost for processing at the respective time is a function of the change in the batch size, the time duration for running batch, the average batch size, and the opportunity cost per unit time.

15. The method of claim 9, wherein assessing a cost for a lot at a respective time is a function of a decreasing convex cost of lateness function, a lot budget, and a cost of lateness factor.

16. The method of claim 9, further comprising iterating the determination of when to begin processing.

17. A manufacturing process flow, comprising:

a processing tool that processes batch-by-batch;

a batch of present lots;

a plurality of additional lots that may be included in the batch; and

a software agent capable of;

ascertaining a respective time at which each of the additional lots may be received into the batch, the batch including a plurality of present lots;

assessing a cost for the processing tool, each additional lot, and each present lot for each respective time at which each additional lot will be received should the processing tool begin processing the batch at the respective time; and

determining the respective time at which the total cost borne by the processing tool, each additional lot, and each present lot will be at a minimum.

18. The manufacturing process flow of claim 17, wherein there is a future batch scheduled for the tool and assessing a cost for each present lot for each respective time at which each additional lot could be received includes assessing the cost for each lot in the future batch.

19. The manufacturing process flow of claim 17, wherein assessing the cost for the tool at each respective time includes assessing a cost for waiting until the respective time and a cost for processing at the respective time.

20. The manufacturing process flow of claim 19, wherein assessing the cost for waiting and the cost for processing at the respective time includes assessing a cost per unit time.

21. The manufacturing process flow of claim 17, wherein assessing a cost for a lot at a respective time is a function of a decreasing convex cost of lateness function, a lot budget, and a cost of lateness factor.

22. The manufacturing process flow of claim 17, wherein the software agent is further capable of iterating the determination of when to begin processing.

23. The manufacturing process flow of claim 17, wherein the processing tool is selected from the group consisting of a fabrication tool and a metrology tool.

24. The manufacturing process flow of claim 17, wherein the software agent comprises an object implemented using an object-oriented programming technique.

25. The manufacturing process flow of claim 17, wherein the additional lots and the present lots comprise lots of semiconducting wafers.

26. A manufacturing process flow, comprising:

a processing tool that processes batch-by-batch;

a batch of present lots;

a plurality of additional lots that may be included in the batch; and

a computing system including at least one computing device programmed to;

ascertain a respective time at which each of the additional lots may be received into the batch, the batch including a plurality of present lots;

assess a cost for the processing tool, each additional lot, and each present lot for each respective time at which each additional lot will be received should the processing tool begin processing the batch at the respective time; and

determine the respective time at which the total cost borne by the processing tool, each additional lot, and each present lot will be at a minimum.

27. The manufacturing process flow of claim 26, wherein there is a future batch scheduled for the tool and assessing a cost for each present lot for each respective time at which each additional lot could be received includes assessing the cost for each lot in the future batch.

28. The manufacturing process flow of claim 26, wherein assessing the cost for the tool at each respective time includes assessing a cost for waiting until the respective time and a cost for processing at the respective time.

29. The manufacturing process flow of claim 26, wherein assessing the cost for waiting and the cost for processing at the respective time includes assessing a cost per unit time.

30. The manufacturing process flow of claim 26, wherein assessing a cost for a lot at a respective time is a function of a decreasing convex cost of lateness function, a lot budget, and a cost of lateness factor.

31. The manufacturing process flow of claim 26, wherein the computing device is further capable of periodically reassessing the determination of when to begin processing.

32. The manufacturing process flow of claim 26, wherein the processing tool is selected from the group consisting of a fabrication tool and a metrology tool.

33. The manufacturing process flow of claim 26, wherein the computing system is selected from the group consisting of a local area network, a wide area network, a system area network, an intranet, or a portion of the Internet.

34. The manufacturing process flow of claim 26, wherein the additional lots and the present lots comprise lots of semiconducting wafers.