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Implantable pressure sensors

  • US 7,028,550 B2
  • Filed: 12/28/2004
  • Issued: 04/18/2006
  • Est. Priority Date: 12/11/2003
  • Status: Active Grant
First Claim
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1. An implantable pressure sensor structure comprising:

  • a substrate formed with an opening;

    a compliant member mounted on said substrate and spanning said opening in a manner such that said compliant member has first and second opposing exposed surfaces; and

    at least first and second strain transducers positioned on the same surface or opposing surfaces of said compliant member so that their outputs respond oppositely to deflection of said compliant member resulting from differential pressure across said complaint member but respond similarly to deformation of said substrate;

    wherein said first and second strain transducers comprise piezoresistors fabricated from a stable gauge material and covered by a passivating layer; and

    wherein said pressure sensor structure is a low-drift pressure sensor structure.

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