Pump controller for precision pumping apparatus

• US 7,029,238 B1
• Filed: 11/23/1999
• Issued: 04/18/2006
• Est. Priority Date: 11/23/1998
• Status: Expired due to Fees

• Current Assignee: Entegris Incorporated
• Original Assignee: Mykrolis Corporation (Entegris Incorporated)
• Inventors: McLoughlin, Robert F., Zagars, Raymond A.
• Primary Examiner(s): CAMPBELL, THOR S
• Application Number:
  US09/447,504
• Time in Patent Office: 2,338 Days
• Field of Search: 417/26, 417/53, 417/395, 417/412, 417/413.1, 222/189.06, 222/255, 222/334
• US Class Current: 417/26
• CPC Class Codes: F04B 13/00 Pumps specially modified to deliver fixed or variable measured quantities
• CPC Class Codes: F04B 2201/0201 Position of the piston
• CPC Class Codes: F04B 2201/0601 Opening times
• CPC Class Codes: F04B 2205/03 Pressure in the compression chamber
• CPC Class Codes: F04B 43/02 having plate-like flexible members, e.g. diaphragms F04B43/14 takes precedence
• CPC Class Codes: F04B 49/065 and making use of computers
• CPC Class Codes: F04B 7/0076 the members being actuated by electro-magnetic means

Abstract

A pump controller and pump controlling method for dispensing a precise amount of low viscosity fluid are provided in which the problems of double dispenses and stuttered dispenses are avoided. In particular, the timing of the valves and motors in the pumping apparatus are adjusted to avoid these problems.

Claims

1. A process for controlling a multistage pump to dispense a fluid, the multistage pump having a feed chamber, a dispensation chamber, and an outlet valve of the multistage pump coupled to the dispensation chamber, the process comprising:

a first stage, wherein while a first valve between the feed chamber and the dispensation chamber is closed and the outlet valve is closed, the dispensation chamber is brought to an equilibrium pressure state; and

a second stage, wherein a dispensation pump disposed in the dispensation chamber is activated to dispense the fluid through the outlet valve and onto an object upon opening the outlet valve and activating the dispensation pump.

2. The process of claim 1, wherein a stepper motor is used in bringing the dispensation chamber to the equilibrium pressure state.

3. The process of claim 1, wherein the equilibrium pressure state is approximately 0 psi.

4. The process of claim 1, wherein during the second stage, the outlet valve is opened before the dispensation pump is activated.

5. The process of claim 1, wherein:

a purge valve is coupled to the dispensation chamber;

during the first stage, the purge valve is open; and

during the second stage, the purge valve is closed.

6. The process of claim 1, wherein the fluid has a viscosity less than approximately five centipoise.

7. The process of claim 4, wherein during the second stage, a period of time elapses between a time when the outlet valve is opened and before a time when the dispensation pump is activated.

8. The process of claim 4, further comprising a third stage, wherein the dispensation pump is operated in reverse to suck back part of the fluid into the dispensation chamber, and wherein the outlet valve is closed after the part of the fluid is sucked back into the dispensation chamber.

9. The process of claim 4, wherein:

a filter lies between the feed chamber and the dispensation chamber; and

the first valve lies between the filter and the dispensation chamber.

10. The process of claim 8, wherein excess fluid spitting is substantially eliminated from the dispensation chamber.

11. The process of claim 9, further comprising:

a fill stage, wherein an inlet valve to the multistage pump is coupled to the feed chamber and during the fill stage, while the inlet valve is open, a second valve lying between the feed chamber and the filter is closed, and a vent valve is closed, the feed chamber is put under vacuum to allow the fluid enter the feed chamber;

a filter stage, wherein during the filter stage, while the inlet valve is closed, the first valve is opened, and the second valve is opened, pressure is applied to the feed chamber so that the fluid flows through the filter; and

a vent stage, wherein during the vent stage, while the fluid in the feed chamber is under pressure, the inlet valve is closed, the first valve is closed, the second valve is opened, and a vent valve is opened.

12. A process for controlling a multistage pump to dispense a fluid, the multistage pump having a feed chamber, a dispensation chamber, and an outlet valve of the multistage pump coupled to the dispensation chamber, the process comprising a first stage, wherein after the outlet valve is opened, a dispensation pump disposed in the dispensation chamber is activated to dispense the fluid through the outlet valve and onto an object.

13. The process of claim 12, wherein during the first stage, a period of time elapses between a time when the outlet valve is opened and before a time when the dispensation pump is activated.

14. The process of claim 12, further comprising a second stage performed before the first stage, wherein while a first valve between the feed chamber and the dispensation chamber is closed and the outlet valve is closed, a stepper motor is used to bring the dispensation chamber to substantially atmospheric pressure.

15. The process of claim 14, wherein:

a purge valve is coupled to the dispensation chamber;

during the first stage, the purge valve is closed; and

during the second stage, the purge valve is open.

16. The process of claim 12, wherein:

a filter lies between the feed chamber and the dispensation chamber; and

the first valve lies between the filter and the dispensation chamber.

17. The process of claim 16, further comprising:

a fill stage, wherein an inlet valve to the multistage pump is coupled to the feed chamber and during the fill stage, while the inlet valve is open, a second valve lying between the feed chamber and the filter is closed, and a vent valve is closed, the feed chamber is put under vacuum to allow the fluid enter the feed chamber;

a filter stage, wherein during the filter stage, while the inlet valve is closed, the first valve is opened, and the second valve is opened, pressure is applied to the feed chamber so that the fluid flows through the filter; and

a vent stage, wherein during the vent stage, while the fluid in the feed chamber is under pressure, the inlet valve is closed, the first valve is closed, the second valve is opened, and a vent valve is opened.

18. The process of claim 12, further comprising a second stage performed after the first stage, wherein the dispensation pump is operated in reverse to suck back part of the flow into the dispensation chamber, and wherein the outlet valve is closed after an amount of fluid is sucked back into the dispensation chamber.

19. The process of claim 12, wherein the fluid has a viscosity less than approximately five centipoise.