MEMS reflectarray antenna for satellite applications

• US 7,030,824 B1
• Filed: 05/29/2003
• Issued: 04/18/2006
• Est. Priority Date: 05/29/2003
• Status: Expired due to Fees

• Current Assignee: Lockheed Martin Corporation (Martin Marietta Corporation)
• Original Assignee: Lockheed Martin Corporation (Martin Marietta Corporation)
• Inventors: Matyas, Gerard Joseph, Katz, Allen, Silverman, George Arthur, Taft, William Joseph, SooHoo, Wing Joseph, Jacomb-Hood, Anthony
• Primary Examiner(s): Chen, Shih-Chao
• Assistant Examiner(s): A, Minh Dieu
• Application Number:
  US10/448,265
• Time in Patent Office: 1,055 Days
• Field of Search: 343/853, 343/897, 343/770, 343/771, 343/700.MS, 343/767, 343/872, 342/128, 342/368, 342/394, 342/406
• US Class Current: 343/767
• CPC Class Codes: H01L 2223/6611 Wire connections
• CPC Class Codes: H01L 2223/6677 for antenna, e.g. antenna included within housing of semiconductor device
• CPC Class Codes: H01L 2224/48227 connecting the wire to a bond pad of the item
• CPC Class Codes: H01L 2224/73267 Layer and HDI connectors
• CPC Class Codes: H01L 2924/15153 the die mounting substrate comprising a recess for hosting the device
• CPC Class Codes: H01L 2924/15192 Resurf arrangement of the internal vias
• CPC Class Codes: H01L 2924/15321 being a ball array, e.g. BGA
• CPC Class Codes: H01L 2924/16195 Flat cap [not enclosing an internal cavity]
• CPC Class Codes: H01Q 3/46 Active lenses or reflecting arrays

Abstract

Methods and apparatus provide vibration-free steered-beam antennas using a module to accommodate segregated de and rf signals. A phase-shifter element is disposed within an interior of the module. A radiating element is provided, and an rf interface is adapted to couple energy between the phase-shifter element and the radiating element. The rf interface is disposed entirely within the interior of the module and is adapted to provide an rf interface with the module substantially only through the radiating element. A dc interface is adapted to couple energy between the phase-shifter element and an electrical connection element disposed exterior to the module.

Claims

1. A module comprising:

a phase-shifter element disposed within an interior of the module;

a radiating element;

a metallized ground plane disposed within the interior of the module between the radiating element and the phase-shifter element;

a radio-frequency (“

rf”

) interface adapted to couple energy between the phase-shifter element and the radiating element, wherein the rf interface is disposed entirely within the interior of the module and is adapted to provide an rf interface with the module substantially only through the radiating element; and

a direct-current (“

dc”

) interface adapted to couple energy between the phase-shifter element and an electrical connection element disposed exterior to the module.

2. The module recited in claim 1 wherein:

the phase-shifter element comprises a plurality of phase-shifter elements that define a device plane; and

the radiating element comprises an array of radiating elements positioned to interact with an electromagnetic beam propagating substantially orthogonally to the device plane.

3. The module recited in claim 1 wherein the phase-shifter element comprises a microelectromechanical-systems (“

MEMS”

) phase-shifter element.

4. The module recited in claim 1 wherein the phase-shifter element comprises a series reflection phase-shifter element.

5. The module recited in claim 1 wherein the phase-shifter element comprises a parallel reflection phase-shifter element.

6. The module recited in claim 1 wherein the phase-shifter element comprises a transmission phase-shifter element serially coupled with a reflection phase-shifter element.

7. The module recited in claim 6 wherein the transmission phase-shifter element comprises an analog transmission phase-shifter element.

8. The module recited in claim 6 wherein the transmission phase-shifter element comprises a digital transmission phase-shifter element.

9. The module recited in claim 1 further comprising a cover disposed to seal a cavity within the interior of the module in which the phase-shifter element is disposed.

10. The module recited in claim 1 wherein the rf interface comprises:

a metallized rf matching line electrically coupled with the phase-shifter element; and

a coupling slot in the metallized ground plane through which energy may be coupled with the radiating element.

11. The module recited in claim 10 wherein the metallized rf matching line extends a length beyond the coupling slot substantially equal to μ

g/4, wherein μ

g is a guide wavelength of the metallized rf matching line.

12. The module recited in claim 10 further comprising:

a first dielectric layer disposed between the radiating element and the ground; and

a second dielectric layer disposed between the ground plane and the metallized rf matching line.

13. The module recited in claim 1 wherein the rf interface comprises:

a metallized rf transmission line electrically coupled with the phase-shifter element; and

a metallized via disposed to provide a metallic connection through the metallized ground plane between the metallized rf transmission line and the radiating element.

14. The module recited in claim 13 wherein the radiating element is selected from the group consisting of a helix radiating element and a dipole radiating element.

15. The module recited in claim 1 further comprising a ball grid array coupled with the dc interface and adapted to electrically couple the module with an external element using only dc energy thereby eliminating any hardwired rf connection.

16. The module recited in claim 15 wherein the dc interface comprises:

a metallized dc bias line electrically coupled with the phase-shifter element; and

a metallized via stack through a dielectric stack within the interior of the module connecting the metallized dc bias line with a ball of the ball grid array.

17. The module recited in claim 1 wherein the radiating element comprises a patch-antenna radiating element.

18. The module recited in claim 1 wherein the radiating element comprises a stacked-patch-antenna radiating element.

19. The module recited in claim 1 wherein the radiating element comprises a slot radiating element.

20. A method for manufacturing a module for a reflectarray antenna, the method comprising:

disposing a radiating element over a first surface of a first dielectric layer;

forming a metallized ground plane over a second surface of the first dielectric layer;

disposing a phase-shifter element over the metallized ground plane;

forming a radio-frequency (“

rf”

) interface adapted to couple energy between the phase-shifter element and the radiating element and to provide an rf interface with the module substantially only through the radiating element;

forming a direct-current (“

dc”

) interface adapted to couple energy between the phase-shifter element and an exterior to the module; and

sealing the phase-shifter element within an interior of the module.

21. The method recited in claim 20 wherein:

disposing the phase-shifter element over the metallized ground plane comprises disposing a plurality of MEMS phase-shifter elements to define a device plane; and

disposing the radiating element over the first surface of the first dielectric layer comprises disposing an array of radiating elements over the first surface of the first dielectric layer positioned to interact with an electromagnetic beam propagating substantially orthogonally to the device plane.

22. The method recited in claim 20 wherein the phase-shifter element comprises a microelectromechanical-systems (“

MEMS”

) phase-shifter element.

23. The method recited in claim 22 wherein disposing the MEMS phase-shifter element comprises:

disposing a second dielectric layer over the metallized ground plane, the second dielectric layer having a gap; and

positioning the MEMS phase-shifter element within the gap.

24. The method recited in claim 23 wherein forming the rf interface comprises:

forming a coupling slot in the metallized ground plane;

forming a metallized rf matching line over a surface of the second dielectric layer opposite the metallized ground plane both electrically coupled with the MEMS phase-shifter element and electromagnetically coupled with the radiating element through the coupling slot.

25. The method recited in claim 23 wherein forming the rf interface comprises:

forming a metallized rf transmission line over a surface of the second dielectric layer opposite the metallized ground plane and electrically coupled with the MEMS phase-shifter element; and

forming a metallized via to provide a metallic connection through the metallized ground plane between the metallized rf transmission line and the radiating element.

26. The method recited in claim 23 wherein forming the dc interface comprises:

forming a metallized dc bias line over a surface of the second dielectric layer opposite the metallized ground plane and electrically coupled with the MEMS phase-shifter element;

disposing a third dielectric layer comprising a metallized via over the metallized dc bias line; and

forming an electrical connection to the metallized via over the third dielectric layer exterior to the module.

27. The method recited in claim 26 wherein each of the dielectric layers comprises powdered ceramic mixed with a binder, the method further comprising sintering the module to remove the binder.