Brush scrubbing-high frequency resonating substrate processing system

• US 7,032,269 B2
• Filed: 09/30/2005
• Issued: 04/25/2006
• Est. Priority Date: 02/28/2003
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Redeker, Fritz C., Mikhaylichenko, Katrina
• Primary Examiner(s): Crispino, Richard
• Assistant Examiner(s): KARLS, SHAY LYNN
• Application Number:
  US11/241,213
• Publication Number:
  US 20060016029A1
• Time in Patent Office: 207 Days
• Field of Search: 15/77, 15/221, 15/882, 15/883, 151/02, 15/94, 151/035, 15/971
• US Class Current: 15/102
• CPC Class Codes: B08B 1/32 using rotary cleaning members
• CPC Class Codes: B08B 3/12 by sonic or ultrasonic vibrations washing or rinsing machines for crockery or tableware using sonic or ultrasonic waves A47L15/13; of natural teeth, of prostheses using ultrasonic techniques similar to those used for natural teeth A61C17/20; application of ultrasonic vibrations to chemical, physical or physico-chemical processes in general B01J19/10
• CPC Class Codes: H01L 21/67046 using mainly scrubbing means, e.g. brushes

Abstract

A substrate processing system is provided. The substrate processing system comprises a brush assembly that includes a core, a transducer, and a brush. The core is configured to include a plurality of orifices extending from a center of the brush core to an outer surface of the brush core. The transducer is configured to be disposed on an outer surface of the core. The transducer is capable of resonating at a high frequency. The brush includes a plurality of openings, and is configured to cover the transducer. When the transducer resonates at the high frequency, high energy acoustic energy is imparted from the transducer to a surface of a substrate to be prepared at a respective location of each opening of the plurality of openings.

Claims

1. A brush scrubbing-high frequency acoustic energy (AE) cleaning system, comprising:

a brush core having a first end, a second end, and an outer surface, the brush core including a plurality of orifices extending from a center of the brush core to the outer surface of the brush core;

a shaft connected to the first end of the brush core;

a fluid inlet configured to deliver a fluid medium to the brush core through the shaft;

a transducer being disposed on an outer surface of the brush core, the transducer being capable of resonating at a high frequency; and

a brush configured to cover the transducer, the brush including a plurality of openings,

wherein when the transducer resonates at the high frequency, high energy acoustic energy is imparted from the transducer to a surface of a substrate to be processed at respective locations of the plurality of openings.

2. The system as recited in claim 1, wherein a fluid medium is introduced onto the surface of the substrate to be processed through the brush core and the brush.

3. The system as recited in claim 1, wherein the transducer is configured to cover substantially the entire outer surface of the brush core.

4. The system as recited in claim 1, wherein at least one of the plurality of orifices in the brush core is exposed to the brush.

5. The system as recited in claim 1, wherein the plurality of orifices is configured to be substantially filled with the fluid medium.

6. The system as recited in claim 1, wherein the plurality of openings is configured to be substantially filled with the fluid medium.

7. A substrate processing system, comprising:

a brush assembly, the brush assembly including,

a core configured to include a plurality of orifices extending from a center of the brush core to an outer surface of the brush core;

a transducer configured to be disposed on an outer surface of the core, the transducer being capable of resonating at a high frequency; and

a brush configured to cover the transducer, the brush including a plurality of openings,

wherein when the transducer resonates at the high frequency, high energy acoustic energy is imparted from the transducer to a surface of a substrate to be prepared at a respective location of each opening of the plurality of openings.

8. The system as recited in claim 7, the system further comprising:

a fluid inlet configured to deliver a fluid medium to the brush core through a shaft.

9. The system as recited in claim 8, wherein the fluid medium is introduced onto the surface of the substrate through the brush core and the brush.

10. The system as recited in claim 8, wherein the plurality of orifices is configured to be substantially filled with the fluid medium.

11. The system as recited in claim 8, wherein the plurality of openings is configured to be substantially filled with the fluid medium.

12. The system as recited in claim 7, wherein the system is a substrate cleaning system.

13. The system as recited in claim 7, wherein the transducer is configured to cover substantially the entire outer surface of the brush core.

14. The system as recited in claim 7, wherein at least one of the plurality of orifices in the brush core is exposed to the brush.