Piezoelectric cantilever pressure sensor array
First Claim
1. A piezoelectric cantilever pressure sensor array, comprising:
- a substrate;
a readout circuit, andpiezoelectric cantilever pressure sensors electrically connected to the readout circuit, each piezoelectric cantilever pressure sensor comprising an elongate piezoelectric cantilever mounted at one end on the substrate and extending over a cavity, the piezoelectric cantilever comprising;
a first electrode;
a second electrode; and
a piezoelectric element between the first electrode and the second electrode and electrically connected thereto.
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Abstract
A piezoelectric cantilever pressure sensor array is disclosed. The piezoelectric cantilever pressure sensor array contains a substrate, a readout circuit, and piezoelectric cantilever pressure sensors electrically connected to the readout circuit. Each piezoelectric cantilever pressure sensor contains an elongate piezoelectric cantilever mounted at one end on the substrate and extending over a cavity. The piezoelectric cantilever contains a piezoelectric layer sandwiched between two electrodes and generates a measurable voltage when deformed under pressure. The piezoelectric cantilever pressure sensor array can be manufactured at low cost and used in various applications including fingerprint identification devices.
35 Citations
20 Claims
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1. A piezoelectric cantilever pressure sensor array, comprising:
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a substrate; a readout circuit, and piezoelectric cantilever pressure sensors electrically connected to the readout circuit, each piezoelectric cantilever pressure sensor comprising an elongate piezoelectric cantilever mounted at one end on the substrate and extending over a cavity, the piezoelectric cantilever comprising; a first electrode; a second electrode; and a piezoelectric element between the first electrode and the second electrode and electrically connected thereto. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A piezoelectric cantilever pressure sensor array comprising:
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a substrate; a readout circuit, piezoelectric cantilever pressure sensors electrically connected to the readout circuit, each piezoelectric cantilever pressure sensor comprising an access transistor and an elongate piezoelectric cantilever mounted at one end on the substrate and extending over a cavity, wherein the piezoelectric cantilever comprising a first electrode, a second electrode, and a piezoelectric element between the first electrode and the second electrode and electrically connected thereto, and wherein the access transistor comprises a source contact, a gate contact and a drain contact;
the drain contact is connected to the first electrode;
the source contact is connected to receive a reference voltage; and
the gate contact is connected to receive an activation signal;first conductive lines each extending between the readout circuit and the second electrodes of ones of the piezoelectric cantilever pressure sensors arrayed in a first direction; and
,second lines each extending between the readout circuit and the gates of the access transistors electrically connected to ones of the piezoelectric cantilever pressure sensors arrayed in a second direction, orthogonal to the first direction. - View Dependent Claims (20)
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Specification