Biochip for the capacitive stimulation and/or detection of biological tissue and a method for its production
First Claim
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1. A biochip for capacitive stimulation and/or detection of biological tissue comprising:
- a support structure;
at least one stimulation and/or sensor device arranged in or on the support structure; and
at least one dielectric layer, one layer surface of which is arranged on the stimulation and/or sensor device and the opposite layer surface of which forms a stimulation and/or sensor surface for the capacitive stimulation and/or detection of biological tissue;
wherein the dielectric layer includes (Tix, Zr1-x)O2, with 0.99≧
x≧
0.5, or a TiO2 and ZrO2 layer arrangement.
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Abstract
The present invention relates to a biochip for capacitive stimulation and/or detection of biological tissue. The biochip includes a support structure, at least one stimulation and/or sensor device, which is arranged in or on the support structure, and at least one dielectric layer, one layer surface of which is arranged on the stimulation and/or sensor device and the opposite layer surface forms a stimulation and/or sensor surface for the capacitive stimulation and/or detection of biological tissue. The dielectric layer includes (Tix, Zr1-x)O2, with 0.99≧x≧0.5, or a TiO2 and ZrO2 layer arrangement.
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Citations
16 Claims
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1. A biochip for capacitive stimulation and/or detection of biological tissue comprising:
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a support structure; at least one stimulation and/or sensor device arranged in or on the support structure; and at least one dielectric layer, one layer surface of which is arranged on the stimulation and/or sensor device and the opposite layer surface of which forms a stimulation and/or sensor surface for the capacitive stimulation and/or detection of biological tissue; wherein the dielectric layer includes (Tix, Zr1-x)O2, with 0.99≧
x≧
0.5, or a TiO2 and ZrO2 layer arrangement. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for producing a biochip for capacitive stimulation and/or detection of biological tissue, comprising the steps of:
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providing a support structure; forming at least one stimulation and/or sensor device in or on the support structure; and arranging a dielectric layer of (Tix, Zr1-x)O2, with 0.99≧
x≧
0.5 or a TiO2 and ZrO2 layer arrangement on the stimulation and/or sensor device in such a way that one layer surface of the dielectric layer is arranged on the stimulation and/or sensor device and the opposite layer surface of the layer forms a stimulation and/or sensor surface for the capacitive stimulation and/or detection of biological tissue. - View Dependent Claims (12, 13, 14, 15, 16)
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Specification