Optical modulator, display device and manufacturing method for same
First Claim
1. An optical modulator comprising:
- a first substrate having at least one first groove on one face thereof, said at least one first groove having a movable reflective film that oscillates in accordance with an electrostatic force formed on the bottom face thereof; and
a light-transmitting second substrate opposing said first substrate and having at least one second groove provided on the face thereof opposing said first substrate, said at least one second groove extending in a direction approximately orthogonal to said at least one first groove and having a transparent electrode formed on the bottom face thereof;
wherein said movable reflective film and said transparent electrode form a picture element at an intersection of said first and second grooves.
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Accused Products
Abstract
An optical modulator is provided which can be manufactured by means of a simple process, and a display device, and a method of manufacturing same. The optical modulator comprises a first substrate having a movable reflective film that oscillates in accordance with the application of an electrostatic force; a light-transmitting second substrate disposed so as to oppose the first substrate and formed with a transparent electrode for applying the electrostatic force, in a position corresponding to the movable reflective film; and a cavity section, demarcated by the first substrate and the second substrate, for restricting the range of oscillation of the movable reflective film. By forming a movable reflective film by a portion of the substrate and determining the range of oscillation of the movable reflective film by the interval between the substrates, an optical modulator of high durability and high precision can be obtained.
167 Citations
9 Claims
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1. An optical modulator comprising:
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a first substrate having at least one first groove on one face thereof, said at least one first groove having a movable reflective film that oscillates in accordance with an electrostatic force formed on the bottom face thereof; and a light-transmitting second substrate opposing said first substrate and having at least one second groove provided on the face thereof opposing said first substrate, said at least one second groove extending in a direction approximately orthogonal to said at least one first groove and having a transparent electrode formed on the bottom face thereof; wherein said movable reflective film and said transparent electrode form a picture element at an intersection of said first and second grooves. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification