Z-axis angular rate sensor
First Claim
Patent Images
1. A sensor, having orthogonal x-, y-, and z-axes, for detecting a rate of rotation about the z-axis comprising:
- a substrate; and
a gross mass, symmetrical with respect to the x-axis, suspended from the substrate by a plurality of interior and exterior anchor points, and comprising;
at least two proof masses, symmetrical with respect to the x-axis and the y-axis;
a driven frame surrounding each proof mass and attached to its proof mass and external anchor points by flexures;
a set of drive banks and a first set of sense banks for each driven frame for oscillating along the x-axis;
a second set of sense banks attached to each proof mass for detecting Coriolis motion along the y-axis;
at least two rotating stiff beams, each centrally mounted to an interior anchor point, oriented in a y-direction at rest, and able to rotate about its anchor point in an xy-plane orthogonal to the z-axis; and
a plurality of inner frame supports, asymmetric with respect to the y-axis, connecting the rotating stiff beams to the frames, and comprising a plurality of non-rotating stiff beams and a plurality of flexures, to allow frame motion predominantly along the x-axis in anti-phase motion only such that Coriolis-induced anti-phase motion of the proof masses along the y-axis results.
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Abstract
An oscillatory rate sensor is described for sensing rotation about the “z-axis”. It is tuning-fork in nature with structural linkages and dynamics such that fundamental anti-phase oscillation of two proof masses is accomplished by virtue of the mechanical linkages.
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Citations
10 Claims
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1. A sensor, having orthogonal x-, y-, and z-axes, for detecting a rate of rotation about the z-axis comprising:
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a substrate; and a gross mass, symmetrical with respect to the x-axis, suspended from the substrate by a plurality of interior and exterior anchor points, and comprising; at least two proof masses, symmetrical with respect to the x-axis and the y-axis; a driven frame surrounding each proof mass and attached to its proof mass and external anchor points by flexures; a set of drive banks and a first set of sense banks for each driven frame for oscillating along the x-axis; a second set of sense banks attached to each proof mass for detecting Coriolis motion along the y-axis; at least two rotating stiff beams, each centrally mounted to an interior anchor point, oriented in a y-direction at rest, and able to rotate about its anchor point in an xy-plane orthogonal to the z-axis; and a plurality of inner frame supports, asymmetric with respect to the y-axis, connecting the rotating stiff beams to the frames, and comprising a plurality of non-rotating stiff beams and a plurality of flexures, to allow frame motion predominantly along the x-axis in anti-phase motion only such that Coriolis-induced anti-phase motion of the proof masses along the y-axis results. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification