MEMS gyroscope with horizontally oriented drive electrodes

• US 7,036,373 B2
• Filed: 06/29/2004
• Issued: 05/02/2006
• Est. Priority Date: 06/29/2004
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Johnson, Burgess R., Weber, Mark W.
• Primary Examiner(s): KWOK, HELEN C
• Application Number:
  US10/881,499
• Publication Number:
  US 20050284222A1
• Time in Patent Office: 672 Days
• Field of Search: 735/040.2, 735/040.4, 735/041.2, 735/041.4, 735/041.5, 735/041.6, 735/141.6, 735/142.9, 735/143.2
• US Class Current: 73/504.14
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis

Abstract

Devices and methods for reducing rate bias errors and scale factor errors in a MEMS gyroscope are disclosed. A MEMS actuator device in accordance with an illustrative embodiment of the present invention can include at least one substrate including one or more horizontal drive electrodes, and a movable electrode spaced vertically from and adjacent to the one or more horizontal drive electrodes. The horizontal drive electrodes and/or movable electrode can be configured to eliminate or reduce rate bias and scale factor errors resulting from the displacement of the movable electrode in the direction of a sense axis of the device.

Claims

1. A MEMS actuator device, comprising:

at least one substrate including one or more horizontal drive electrodes; and

a movable electrode spaced vertically from and adjacent to the one or more horizontal drive electrodes, said movable electrode adapted to oscillate back and forth horizontally along a motor drive axis of the actuator device.

2. The MEMS actuator device of claim 1, wherein said at least one substrate comprises a lower substrate.

3. The MEMS actuator device of claim 1, wherein said at least one substrate comprises an upper substrate.

4. The MEMS actuator device of claim 1, wherein said at least one substrate comprises a lower substrate and an upper substrate.

5. The MEMS actuator device of claim 4, wherein said one or more horizontal drive electrodes comprises:

a lower horizontal drive electrode coupled to the lower substrate; and

an upper horizontal drive electrode coupled to the upper substrate.

6. The MEMS actuator device of claim 5, wherein the movable electrode comprises a planar structure having an upper surface and a lower surface.

7. The MEMS actuator device of claim 6, wherein the lower surface of the movable electrode extends parallel or substantially parallel to an upper surface of the lower horizontal drive electrode.

8. The MEMS actuator device of claim 6, wherein the upper surface of the movable electrode extends parallel to or substantially parallel to a lower surface of the upper horizontal drive electrode.

9. The MEMS actuator device of claim 5, wherein the lower horizontal drive electrode and upper horizontal drive electrode each define a length, and wherein the length of the upper horizontal drive electrode is different than the length of the lower horizontal drive electrode.

10. The MEMS actuator device of claim 5, wherein the lower horizontal drive electrode and upper horizontal drive electrode each define a length, and wherein the length of the upper horizontal drive electrode is similar or equal to the length of the second horizontal drive electrode.

11. The MEMS actuator device of claim 1, wherein the movable electrode comprises a proof mass having one or more drive tines.

12. The MEMS actuator device of claim 11, wherein each of the one or more horizontal drive electrodes defines a width along the direction of a sense axis parallel to the at least one substrate, and wherein said width is greater than a corresponding width of each respective drive tine.

13. The MEMS actuator device of claim 11, wherein each of the one or more horizontal drive electrodes defines a width along the direction of a sense axis parallel to the at least one substrate, and wherein said width is less than a corresponding width of each respective drive tine.

14. The MEMS actuator device of claim 1, wherein each of the one or more horizontal drive electrodes includes a number of split horizontal drive electrodes.

15. The MEMS actuator device of claim 1, wherein each of the one or more horizontal drive electrodes includes a single horizontal drive electrode.

16. The MEMS actuator device of claim 1, further comprising a motor drive voltage source for inducing a charge on the one or more horizontal drive electrodes.

17. The MEMS actuator device of claim 1, further comprising sensing means for sensing motion of the movable electrode along a sense axis parallel to the at least one substrate.

18. The MEMS actuator device of claim 1, further comprising means for coupling the movable electrode to the at least one substrate.

19. The MEMS actuator device of claim 18, wherein said means for coupling the movable electrode to the at least one substrate includes one or more suspension springs.

20. A MEMS actuator device, comprising:

a lower substrate including at least one lower horizontal drive electrode;

an upper substrate including at least one upper horizontal drive electrode; and

a movable proof mass adapted to oscillate back and forth horizontally within an interior space of the upper and lower substrates vertically adjacent to the at least one lower and upper horizontal drive electrodes.

21. The MEMS actuator device of claim 20, wherein the movable proof mass comprises a planar structure having an upper surface and a lower surface.

22. The MEMS actuator device of claim 21, wherein the lower surface of the movable proof mass extends parallel or substantially parallel to an upper surface of the lower horizontal drive electrode.

23. The MEMS actuator device of claim 21, wherein the upper surface of the proof mass extends parallel to or substantially parallel to a lower surface of the upper horizontal drive electrode.

24. The MEMS actuator device of claim 20, wherein the lower horizontal drive electrode and upper horizontal drive electrode each define a length, and wherein the length of the upper horizontal drive electrode is different than the length of the lower horizontal drive electrode.

25. The MEMS actuator device of claim 20, wherein the lower horizontal drive electrode and upper horizontal drive electrode each define a length, and wherein the length of the upper horizontal drive electrode is similar or equal to the length of the second horizontal drive electrode.

26. The MEMS actuator device of claim 20, wherein the proof mass includes one or more drive tines.

27. The MEMS actuator device of claim 26, wherein each of the lower and upper horizontal drive electrodes defines a width along the direction of a sense axis parallel to the at least one substrate, and wherein said width is greater than a corresponding width of each respective drive tine.

28. The MEMS actuator device of claim 26, wherein each of the lower and upper horizontal drive electrodes defines a width along the direction of a sense axis parallel to the at least one substrate, and wherein said width is less than a corresponding width of each respective drive tine.

29. The MEMS actuator device of claim 20, wherein each of the lower and upper horizontal drive electrodes includes a number of split horizontal drive electrodes.

30. The MEMS actuator device of claim 20, wherein each of the lower and upper horizontal drive electrodes includes a single horizontal drive electrode.

31. The MEMS actuator device of claim 20, further comprising a motor drive voltage source for inducing a charge on the lower and upper horizontal drive electrodes.

32. The MEMS actuator device of claim 20, further comprising sensing means for sensing motion of the proof mass along a sense axis parallel to the lower and upper substrates.

33. The MEMS actuator device of claim 20, further comprising means for coupling the proof mass to the lower substrate.

34. The MEMS actuator device of claim 33, wherein said means for coupling the proof mass to the lower substrate includes one or more suspension springs.

35. A MEMS actuator device, comprising:

a set of vertically spaced horizontal drive electrodes; and

a movable proof mass adapted to oscillate back and forth horizontally in between the set of vertically spaced horizontal drive electrodes.

36. The MEMS actuator device of claim 35, wherein said set of vertically spaced horizontal drive electrodes includes at least one lower horizontal drive electrode and at least one upper horizontal drive electrode.

37. The MEMS actuator device of claim 36, wherein the proof mass comprises a planar structure having an upper surface and a lower surface.

38. The MEMS actuator device of claim 37, wherein the lower surface of the proof mass extends parallel or substantially parallel to an upper surface of the lower horizontal drive electrode.

39. The MEMS actuator device of claim 37, wherein the upper surface of the proof mass extends parallel to or substantially parallel to a lower surface of the upper horizontal drive electrode.

40. The MEMS actuator device of claim 36, wherein the lower horizontal drive electrode and upper horizontal drive electrode each define a length, and wherein the length of the upper horizontal drive electrode is different than the length of the lower horizontal drive electrode.

41. The MEMS actuator device of claim 36, wherein the lower horizontal drive electrode and upper horizontal drive electrode each define a length, and wherein the length of the upper horizontal drive electrode is similar or equal to the length of the second horizontal drive electrode.

42. The MEMS actuator device of claim 35, wherein the proof mass includes one or more drive tines.

43. The MEMS actuator device of claim 42, wherein each of the horizontal drive electrodes defines a width along the direction of a sense axis, and wherein said width is greater than a corresponding width of each respective drive tine.

44. The MEMS actuator device of claim 42, wherein each of the horizontal drive electrodes defines a width along the direction of a sense axis, and wherein said width it less than a corresponding width of each respective drive tine.

45. The MEMS actuator device of claim 35, wherein each set of vertically spaced horizontal drive electrodes includes a number of split horizontal drive electrodes.

46. The MEMS actuator device of claim 35, wherein each set of vertically spaced horizontal drive electrodes includes a single horizontal drive electrode.

47. The MEMS actuator device of claim 35, further comprising a motor drive voltage source for inducing a charge on each set of vertically spaced horizontal drive electrodes.

48. The MEMS actuator device of claim 35, further comprising sensing means for sensing motion of the proof mass along a sense axis.

49. A MEMS actuator device, comprising:

at least one substrate including one or more horizontal drive electrodes;

a proof mass adapted to oscillate back and forth horizontally in a space vertically adjacent each of the one or more horizontal drive electrodes; and

a motor drive voltage source for inducing a charge on each of the one or more horizontal drive electrodes.

50. A MEMS gyroscope, comprising:

at least one substrate including one or more horizontal drive electrodes;

a proof mass adapted to oscillate back and forth horizontally in a space vertically adjacent each of the one or more horizontal drive electrodes;

a motor drive voltage source for inducing a charge on each of the one or more horizontal drive electrodes; and

sensing means for sensing motion of the proof mass along a sense axis parallel to the at least one substrate.

51. The MEMS gyroscope of claim 50, wherein said at least one substrate comprises a lower substrate.

52. The MEMS gyroscope of claim 50, wherein said at least one substrate comprises an upper substrate.

53. The MEMS gyroscope of claim 50, wherein said at least one substrate comprises a lower substrate and an upper substrate.

54. The MEMS gyroscope of claim 53, wherein said one or more horizontal drive electrodes comprises:

a lower horizontal drive electrode coupled to the lower substrate; and

an upper horizontal drive electrode coupled to the upper substrate.

55. The MEMS gyroscope of claim 54, wherein the proof mass comprises a planar structure having an upper surface and a lower surface.

56. The MEMS gyroscope of claim 55, wherein the lower surface of the proof mass extends parallel or substantially parallel to an upper surface of the lower horizontal drive electrode.

57. The MEMS gyroscope of claim 55, wherein the upper surface of the proof mass extends parallel to or substantially parallel to a lower surface of the upper horizontal drive electrode.

58. The MEMS gyroscope of claim 54, wherein the lower horizontal drive electrode and upper horizontal drive electrode each define a length, and wherein the length of the upper horizontal drive electrode is different than the length of the lower horizontal drive electrode.

59. The MEMS gyroscope of claim 54, wherein the lower horizontal drive electrode and upper horizontal drive electrode each define a length, and wherein the length of the upper horizontal drive electrode is similar or equal to the length of the second horizontal drive electrode.

60. The MEMS gyroscope of claim 50, wherein the proof mass includes one or more drive tines.

61. The MEMS gyroscope of claim 60, wherein each of the one or more horizontal drive electrodes defines a width along the direction of a sense axis parallel to the at least one substrate, and wherein said width is greater than a corresponding width of each respective drive tine.

62. The MEMS gyroscope of claim 60, wherein each of the one or more horizontal drive electrodes defines a width along the direction of a sense axis parallel to the at least one substrate, and wherein said width is less than a corresponding width of each respective drive tine.

63. The MEMS gyroscope of claim 50, wherein each of the one or more horizontal drive electrodes includes a number of split horizontal drive electrodes.

64. The MEMS gyroscope of claim 50, wherein each of the one or more horizontal drive electrodes includes a single horizontal drive electrode.

65. The MEMS gyroscope of claim 50, further comprising means for coupling the proof mass to the at least one substrate.

66. The MEMS gyroscope of claim 65, wherein said means for coupling the proof mass to the at least one substrate includes one or more suspension springs.

67. The MEMS gyroscope of claim 50, wherein said EMS gyroscope is an out-of-plane MEMS gyroscope.

68. A method for reducing rate bias errors and/or scale factor errors in a MEMS gyroscope, comprising the steps of:

providing a MEMS actuator device equipped with a set of vertically spaced horizontal drive electrodes, and a proof mass adapted to oscillate back and forth horizontally in between the set of vertically spaced horizontal drive electrodes;

applying a motor drive voltage to each set of vertically spaced horizontal drive electrodes; and

sensing motion of the proof mass along a sense axis of the device.

69. The method of claim 68, wherein said step of applying a motor drive voltage to each set of vertically spaced horizontal drive electrodes includes the step of reversing the polarity applied to each set of horizontal drive electrodes.

70. The method of claim 68, wherein the MEMS gyroscope includes a sense comb anchor for sensing motion of the proof mass along the sense axis, and wherein said step of sensing motion of the proof mass includes the step of applying a sense bias voltage to the sense comb anchor.