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Methods and systems for measuring internal dimensions of microscale structures

  • US 7,038,472 B1
  • Filed: 05/12/2003
  • Issued: 05/02/2006
  • Est. Priority Date: 05/12/2003
  • Status: Expired due to Fees
First Claim
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1. A method of measuring an internal dimension of a sample structure comprising:

  • providing a reference structure having a known internal dimension and a known length;

    serially connecting a sample structure having an unknown internal dimension and known length to said reference structure;

    flowing a fluid through said reference structure and said sample structure, the fluid flowing through the reference and sample structure forming a first conductive path;

    measuring a first voltage difference across the first conductive path;

    measuring a second voltage difference across a portion of the first conductive path spanning the length of the sample structure; and

    determining the internal dimension of said sample structure from the first voltage difference and the second voltage difference.

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