Methods and systems for measuring internal dimensions of microscale structures
First Claim
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1. A method of measuring an internal dimension of a sample structure comprising:
- providing a reference structure having a known internal dimension and a known length;
serially connecting a sample structure having an unknown internal dimension and known length to said reference structure;
flowing a fluid through said reference structure and said sample structure, the fluid flowing through the reference and sample structure forming a first conductive path;
measuring a first voltage difference across the first conductive path;
measuring a second voltage difference across a portion of the first conductive path spanning the length of the sample structure; and
determining the internal dimension of said sample structure from the first voltage difference and the second voltage difference.
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Abstract
The present invention provides novel devices for measuring internal dimensions of microscale structures. Methods in accordance with the invention use the voltage measured at a midpoint between a reference structure and a sample structure to determine the resistance of the sample structure, and to then calculate an internal dimension of the sample structure.
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Citations
11 Claims
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1. A method of measuring an internal dimension of a sample structure comprising:
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providing a reference structure having a known internal dimension and a known length; serially connecting a sample structure having an unknown internal dimension and known length to said reference structure; flowing a fluid through said reference structure and said sample structure, the fluid flowing through the reference and sample structure forming a first conductive path; measuring a first voltage difference across the first conductive path; measuring a second voltage difference across a portion of the first conductive path spanning the length of the sample structure; and determining the internal dimension of said sample structure from the first voltage difference and the second voltage difference. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification