Robotic storage buffer system for substrate carrier pods
First Claim
1. A storage system for the stocking of objects in a process environment comprising:
- a storage enclosure for storing objects comprising a plurality of storage shelves, each shelf having at least one storage location;
a multi-axis robot mounted to the storage enclosure in an inverted orientation;
an end effector connected to the robot suitable for grasping the objects;
at least one load port; and
a controller for controlling the robot movement;
whereby the robot transfers objects between the load port and the storage locations under control of the controller.
1 Assignment
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Accused Products
Abstract
A storage/buffering system for the stocking and/or buffering of substrate and/or substrate carriers in a process environment includes a 6-axis robot. An end-effector is connected with the robot providing an additional one degree of freedom and a mechanism for grabbing and moving of substrate and/or substrate carriers. The robot is mounted in an inverted orientation to a removable service cart for easy removal of the robot to a service area in the event of breakdown. The robot receives commands from a programmable controller connected to control the robot and configured to direct the arm of the robot through a set of movements. Product is loaded in and out of the system through I/O load ports. Product is stored inside the storage/buffering system on a plurality of storage locations, each with product presence/absence detect sensor. The robot can alternatively be mounted directly to the storage system enclosure structure.
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Citations
9 Claims
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1. A storage system for the stocking of objects in a process environment comprising:
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a storage enclosure for storing objects comprising a plurality of storage shelves, each shelf having at least one storage location;
a multi-axis robot mounted to the storage enclosure in an inverted orientation;
an end effector connected to the robot suitable for grasping the objects;
at least one load port; and
a controller for controlling the robot movement;
whereby the robot transfers objects between the load port and the storage locations under control of the controller. - View Dependent Claims (2, 3, 4, 5)
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6. A storage system for the stocking of substrate carrier pods in a process environment comprising:
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a storage enclosure for storing objects comprising a plurality of storage shelves, each shelf having at least one storage location;
a multi-axis robot attached in an inverted orientation to a linear sliding stage, the linear sliding stage attached to the storage enclosure;
an end effector suitable for grasping the objects connected to the robot and having at least one axis of motion;
at least one load port; and
a controller for controlling the robot movement;
whereby the robot transfers objects between the load port and the storage locations under control of the controller. - View Dependent Claims (7, 8, 9)
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Specification