Microfabricated elastomeric valve and pump systems
First Claim
1. A method of actuating an elastomeric structure comprising:
- providing an elastomeric block formed from a first cured elastomeric layer with a first microfabricated recess adapted to direct a flow of fluid therein, and a second cured elastomeric layer with a second microfabricated recess therein, wherein the first cured elastomeric layer and the second cured elastomeric layer react to bond together to form the elastomeric block, and a membrane portion integral with the first elastomeric layer is deflectable into the first microfabricated recess in response to an actuation force from the second microfabricated recess; and
applying the actuation force to the membrane portion such that the membrane portion is deflected into the first microfabricated recess to control fluid flow through the first recess.
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Accused Products
Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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Citations
13 Claims
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1. A method of actuating an elastomeric structure comprising:
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providing an elastomeric block formed from a first cured elastomeric layer with a first microfabricated recess adapted to direct a flow of fluid therein, and a second cured elastomeric layer with a second microfabricated recess therein, wherein the first cured elastomeric layer and the second cured elastomeric layer react to bond together to form the elastomeric block, and a membrane portion integral with the first elastomeric layer is deflectable into the first microfabricated recess in response to an actuation force from the second microfabricated recess; and
applying the actuation force to the membrane portion such that the membrane portion is deflected into the first microfabricated recess to control fluid flow through the first recess. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of controlling fluid flow through a microfabricated structure comprising:
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providing the microfabricated structure comprising an elastomeric block formed from a first cured elastomeric layer with a first microfabricated recess adapted to direct a flow of fluid therein, and a second cured elastomeric layer with a second microfabricated recess therein, wherein the first cured elastomeric layer and the second cured elastomeric layer react to bond together to form the monolithic elastomeric block, and a membrane portion integral with the first elastomeric layer is deflectable into the first microfabricated recess in response to an actuation force from the second microfabricated recess;
passing the fluid through the first microfabricated recess; and
deflecting the membrane portion into the first microfabricated recess to control fluid flow through the first microfabricated recess. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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Specification