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Microfabricated elastomeric valve and pump systems

  • US 7,040,338 B2
  • Filed: 02/28/2001
  • Issued: 05/09/2006
  • Est. Priority Date: 06/28/1999
  • Status: Expired due to Term
First Claim
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1. A method of actuating an elastomeric structure comprising:

  • providing an elastomeric block formed from a first cured elastomeric layer with a first microfabricated recess adapted to direct a flow of fluid therein, and a second cured elastomeric layer with a second microfabricated recess therein, wherein the first cured elastomeric layer and the second cured elastomeric layer react to bond together to form the elastomeric block, and a membrane portion integral with the first elastomeric layer is deflectable into the first microfabricated recess in response to an actuation force from the second microfabricated recess; and

    applying the actuation force to the membrane portion such that the membrane portion is deflected into the first microfabricated recess to control fluid flow through the first recess.

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