Semi-transparent power monitor integrated with a light producing module

• US 7,042,015 B2
• Filed: 08/08/2001
• Issued: 05/09/2006
• Est. Priority Date: 12/21/1999
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Maeda, Patrick Y., Chua, Christopher L., Peeters, Eric, Sun, Decai, Solberg, Scott, Lemmi, Francesco
• Primary Examiner(s): JACKSON JR, JEROME
• Application Number:
  US09/924,840
• Publication Number:
  US 20020003231A1
• Time in Patent Office: 1,735 Days
• Field of Search: 257/80, 257/81
• US Class Current: 257/81
• CPC Class Codes: B41J 2/45 using light-emitting diode [LED] or laser arrays
• CPC Class Codes: H01L 25/0753 the devices being arranged next to each other
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/3011 Impedance
• CPC Class Codes: H01L 31/1016 comprising transparent or semitransparent devices
• CPC Class Codes: H01L 31/1055 the devices comprising amorphous materials of Group IV of the Periodic Table
• CPC Class Codes: H01S 5/02 Structural details or components not essential to laser action
• CPC Class Codes: H01S 5/0262 Photo-diodes, e.g. transceiver devices, bidirectional devices H01S5/0265 takes precedence
• CPC Class Codes: H01S 5/4025 Array arrangements, e.g. constituted by discrete laser diodes or laser bar H01S5/42 takes precedence

Abstract

A light-producing device integrated with a power monitoring system include a light-producing device from which light is emitted in wavelengths that can range from approximately 700 nm to approximately 3 microns. A semi-transparent sensor is located such that at least a portion of the light emitted passes through the semi-transparent sensor and at least a portion of light is absorbed by the semi-transparent sensor. The semi-transparent sensor is configured to be semi-transparent at wavelengths that can range from 700 nm to 3 microns. The semi-transparent sensor may also be used with an external light source, for example with fiber-optic cables.

Claims

1. A light producing and monitoring system comprising:

a light producing device from which light is emitted with wavelengths that can range from approximately 700 nm to approximately 3 microns; and

a semi-transparent sensor manufactured on a semi-transparent substrate separate from the light-producing device, the semi-transparent substrate bonded to the light-producing device to position the light-producing device where the semi-transparent sensor is located in front of the light producing device, at least a portion of the emitted light passes through the semi-transparent sensor and at least a portion of light is absorbed by the semi-transparent sensor, wherein the semi-transparent sensor is configured to be semi-transparent at the wavelength of the emitted light, the sensor including;

a first transparent/conductive electrode layer deposited on the substrate,

an active sensor element deposited on top of the first transparent/conductive layer,

a second transparent/conductive electrode layer deposited on top of the active sensor element, and

an absorption layer deposited on top of the second transparent/conductive electrode layer to prevent visible light from reaching the active sensor element.

2. The system according to claim 1, wherein the semi-transparent substrate includes one of a quartz, silica, gallium arsenide, and glass substrate.

3. The system according to claim 2 wherein the light producing device and the substrate are connected together by a flip-chip process via solder bumps to define an air gap between the light producing device and the sensor.

4. The system according to claim 1 wherein, the active sensor element is configured of sub-layers including,

a first sub-layer consisting of at least one of a n+ doped amorphous silicon or an amorphous silicon-germanium compound,

a second sub-layer consisting of at least one of intrinsic amorphous silicon or an amorphous silicon-germanium compound, and

a third sub-layer consisting of at least one of a p+ doped amorphous silicon or an amorphous silicon-germanium compound.

5. The light producing and monitoring system as set forth in claim 1, wherein

the first transparent/conductive electrode layer deposited on the substrate is comprised of at least one of, Indium Tin Oxide, Tin Oxide, Zinc Oxide, or polycrystalline silicon;

and

the second transparent/conductive electrode layer deposited on top of the active sensor is comprised of at least one of, Indium Tin Oxide, Tin Oxide, Zinc Oxide, or polycrystalline silicon.

6. The system according to claim 1, further including:

a passivation/release layer located over at least the first transparent/conductive electrode layer and the second transparent/conductive electrode layer.

7. The system according to claim 1, wherein the semi-transparent sensor further includes:

an anti-reflection coating deposited on an upper surface of the second transparent/conductive electrode layer to prevent a light reflection loss.

8. The system according to claim 1, wherein the semi-transparent sensor further includes:

an anti-reflection coating deposited on a lower surface of the first transparent/conductive electrode layer to prevent a light reflection loss.

9. A light producing and monitoring system comprising:

a light producing device from which light is emitted with wavelengths that range from approximately 700 nm to approximately 3 microns;

a semi-transparent substrate; and

a semi-transparent sensor configured on the semi-transparent substrate including;

a first transparent/conductive layer deposited on the substrate,

an active sensor element deposited on top of the first transparent/conductive layer,

a second transparent/conductive layer deposited on top of the active sensor element,

a first anti-reflection layer deposited on top of the second transparent/conductive layer to prevent a light reflection loss, and

an absorption layer deposited on top of the first anti-reflection layer to prevent visible light from reaching the active sensor element,

the semi-transparent sensor being located in front of the light producing device, to allow at least a portion of the emitted light to pass through the semi-transparent sensor and at least a portion of light to be absorbed by the semi-transparent sensor, the semi-transparent sensor being configured to be semi-transparent at the wavelength of the emitted light.

17. The system as set forth in claim 9, further including:

a passivation/release layer located over at least the first transparent/conductive layer and the second transparent/conductive layer.

18. The system as set forth in claim 17, further including:

a second anti-reflection layer deposited about a lower surface of the first transparent/conductive layer to prevent a light reflection loss.

10. A light producing and monitoring system comprising:

a light producing device from which light is emitted with wavelengths that can range from approximately 700 nm to approximately 3 microns;

a semi-transparent substrate;

a semi-transparent sensor including;

a first anti-reflection layer deposited on the substrate,

a first transparent/conductive electrode layer deposited on top of the first anti-reflection layer,

an active sensor element deposited on top of the first transparent/conductive layer and including semiconductor layers,

a second transparent/conductive electrode layer deposited on top of the active sensor,

a second anti-reflection layer deposited on top of the second transparent/conductive layer, and

an absorption layer deposited on top of the second anti-reflection layer to prevent visible light from reaching the active sensor;

the semi-transparent sensor located in front of the light producing device, such that at least a portion of the emitted light passes through the semi-transparent sensor and at least a portion of light is absorbed by the semi-transparent sensor, and wherein the semi-transparent sensor is configured to be semi-transparent at the wavelength of the emitted light.

11. The system according to claim 10, wherein the transparency of the sensor is approximately equal to or greater than 90%.

12. The system according to claim 11, wherein the transparency of the sensor is equal to about 95%.

13. The system according to claim 10, wherein each anti-reflection layer includes silicon.

14. The system according to claim 10, wherein a thickness of each anti-reflection layer is selected to approximately match the wavelength emitted by the light producing device.

15. The system according to claim 10, wherein at least one of the first and second anti-reflection layers includes a plurality of layers.

16. The system according to claim 15, wherein the anti-reflection layers include at least one of:

doped magnesium;

doped cerium; and

doped silicon.