Low-current pogo probe card

• US 7,042,241 B2
• Filed: 09/22/2004
• Issued: 05/09/2006
• Est. Priority Date: 06/10/1997
• Status: Expired due to Fees

• Current Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Cowan, Clarence E., Tervo, Paul A.
• Primary Examiner(s): Nguyen, Vinh P.
• Application Number:
  US10/948,717
• Publication Number:
  US 20050035779A1
• Time in Patent Office: 594 Days
• Field of Search: 324754-762, 324/158.1, 324/73.1, 439/482, 439/824
• US Class Current: 324/756.03
• CPC Class Codes: G01R 1/067 Measuring probes
• CPC Class Codes: G01R 1/06711 Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
• CPC Class Codes: G01R 1/06733 Geometry aspects G01R1/06727 takes precedence
• CPC Class Codes: G01R 1/06772 High frequency probes
• CPC Class Codes: G01R 1/07342 the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Abstract

A probe card includes a plurality of probes, where each probe is supported by the probe card. A plurality of landings are on the top of the probe card. Each of the landings is electrically interconnected with a coaxial cable that is also associated with one of the probes. A plurality of trenches defined by the probe card substantially encircles respective landings.

Claims

1. A probe card comprising:

(a) a plurality of probes;

(b) each of said probes supported by said probe card;

(c) a plurality of landings on the top of said probe card,

(d) each of said landings electrically interconnected with a respective coaxial cable, which is also associated with one of said plurality of said probes;

(e) a plurality of trenches defined by said probe card, each of said trenches substantially encircling a respective one of said landings;

(f) a plurality of conductive regions supported by said card, each of said conductive regions substantially encircling a respective one of said landings.

2. The probe card of claim 1 wherein at least a portion of respective ones of said conductive regions are exterior to respective ones of said respective trenches.

3. The probe card of claim 1 wherein at least one of said conductive regions is at least partially included within said trench.

4. The probe card of claim 3 wherein each of said conductive regions is at least partially included within respective ones of said trenches.

5. The probe card of claim 1 where each of said landings comprise a first contact pad for receiving a force signal, a second contact pad for receiving a sense signal, and a third contact pad for receiving a guard signal where said third contact pad is electrically isolated from said first and second contact pads.