Thin film electromagnet and switching device comprising it
First Claim
Patent Images
1. A thin-film electromagnet comprising:
- a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil,wherein said thin-film electromagnet has magnetic poles at a surface of said first magnetic yoke which surface is opposite to a surface at which said first and second magnetic yokes make contact with each other, and further at an outer surface of said second magnetic yoke.
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Abstract
The present invention provided a thin-film electromagnet including a magnetic yoke and a thin-film coil, characterized in that the magnetic yoke includes a first magnetic yoke and a second magnetic yoke making contact with the first magnetic yoke, the first magnetic yoke is located at a center of a winding of the thin-film coil, and the second magnetic yoke is arranged above or below the thin-film coil such that the second magnetic yoke faces the thin-film coil, and overlaps at least a part of the thin-film coil.
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Citations
31 Claims
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1. A thin-film electromagnet comprising:
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a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil, wherein said thin-film electromagnet has magnetic poles at a surface of said first magnetic yoke which surface is opposite to a surface at which said first and second magnetic yokes make contact with each other, and further at an outer surface of said second magnetic yoke. - View Dependent Claims (2)
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3. A thin-film electromagnet comprising:
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a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil; and an insulating layer formed on said first or second magnetic yoke, wherein said thin-film coil is formed on said insulating layer.
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4. A thin-film electromagnet comprising:
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a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil; and a protection layer covering said first magnetic yoke, said second magnetic yoke and said thin-film coil therewith, wherein said protection layer is planarized at a surface thereof, and said surface of said first magnetic yoke, constituting said magnetic pole, is exposed to a planarized surface of said protection layer.
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5. A thin-film electromagnet comprising:
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a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil, wherein said first and second magnetic yokes have a thickness in the range of 0.1 micrometer to 200 micrometers both inclusive. - View Dependent Claims (6)
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7. A thin-film electromagnet comprising:
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a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil, wherein said first magnetic yoke is arranged above said second magnetic yoke, and said first magnetic yoke is comprised of a central portion located at a center of said winding of which said thin-film coil is comprised, a body portion making contact above said central portion with said central portion, and extending in parallel with said second magnetic yoke in a direction in which said second magnetic yoke extends, and projecting portions upwardly projecting at opposite ends of said body portion.
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8. A method of fabricating a thin-film electromagnet comprising a magnetic yoke and a thin-film coil, said magnetic yoke being comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke being located at a center of a winding of which said thin-film coil is comprised, said method comprising:
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the first step of forming said second magnetic yoke on a substrate; the second step of forming an insulating layer on said second magnetic yoke for electrically insulating said second magnetic yoke and said thin-film coil from each other; the third step of forming said thin-film coil on said insulating layer; the fourth step of forming an insulating layer covering said thin-film coil therewith; the fifth step of forming said first magnetic yoke on said second magnetic yoke; the sixth step of forming a protection film entirely covering a resultant resulted from said fifth step; and the seventh step of planarizing said protection film such that said first magnetic yoke is exposed to a surface of said protection film.
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9. A switching device comprising:
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a thin-film electromagnet comprising a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil; and a swingable unit comprised of a pillar, and a swinger supported on said pillar for making swing-movement about said pillar, and switching is carried out by turning on and off electromagnetic force generated between said thin-film electromagnet and said swinger. - View Dependent Claims (10, 11, 12, 13, 14, 15, 21, 23, 24)
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16. A switching device comprising:
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a first thin-film electromagnet; a substrate in which said first thin-film electromagnet is buried; a first electrical contact formed on a surface of said substrate; a swinger rotatable in a plane vertical to said substrate by virtue of magnetic force generated by said first thin-film electromagnet; and a second electrical contact formed on said swinger such that said second electrical contact makes contact with said first electrical contact when said swinger rotates towards said substrate; wherein said first thin-film electromagnet is comprised of a thin-film electromagnet comprising a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil. - View Dependent Claims (17, 18, 20, 27, 29)
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19. A switching device comprising:
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a first thin-film electromagnet; a second thin-film electromagnet; a substrate in which said first and second thin-film electromagnets are buried; a first electrical contact formed on a surface of said substrate above said first thin-film electromagnet in electrical insulation from said first thin-film electromagnet; a second electrical contact formed on a surface of said substrate above said second thin-film electromagnet in electrical insulation from said second thin-film electromagnet; a swinger rotatable in a plane vertical to said substrate about an intermediate point between said first thin-film electromagnet and said second thin-film electromagnet; a third electrical contact formed on said swinger such that said third electrical contact makes contact with said first electrical contact when said swinger rotates towards said first thin-film electromagnet; and a fourth electrical contact formed on said swinger such that said fourth electrical contact makes contact with said second electrical contact when said swinger rotates towards said second thin-film electromagnet, wherein each of said first and second thin-film electromagnets is comprised of a thin-film electromagnet comprising a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil.
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22. A switching device comprising:
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a first thin-film electromagnet; a substrate in which said first thin-film electromagnet is buried; and a swinger rotatable in a plane vertical to said substrate by virtue of magnetic force generated by said first thin-film electromagnet, wherein said swinger has a light-reflective surface, and said first thin-film electromagnet is comprised of a thin-film electromagnet comprising a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil.
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25. A switching device comprising:
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a first thin-film electromagnet; a substrate in which said first thin-film electromagnet is buried; a swinger rotatable in a plane vertical to said substrate by virtue of magnetic force generated by said first thin-film electromagnet, and a mirror unit mounted on said swinger for reflecting light, wherein said first thin-film electromagnet is comprised of a thin-film electromagnet comprising a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil. - View Dependent Claims (26)
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28. A switching device comprising:
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a thin-film electromagnet comprising a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil; and a swingable unit is comprised of a pillar, and a cantilever supported on said pillar for making swing-movement about said pillar, wherein switching is carried out by turning on and off electromagnetic force generated between said thin-film electromagnet and a free end of said cantilever.
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30. A thin-film electromagnet comprising:
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a magnetic yoke and a thin-film coil, characterized in that said magnetic yoke is comprised of a first magnetic yoke and a second magnetic yoke making contact with said first magnetic yoke, said first magnetic yoke is located at a center of a winding of which said thin-film coil is comprised, and said second magnetic yoke is arranged above or below said thin-film coil such that said second magnetic yoke faces said thin-film coil, and overlaps at least a part of said thin-film coil; a first insulating layer and a second insulating layer; and a protection film, wherein said first insulating layer is located on said second magnetic yoke for electrically insulating said second magnetic yoke and said thin-film coil from each other, said second insulating layer is located on said thin-film coil for covering said thin-film coil therewith, said protecting film is located entirely on said second yoke and said thin-film coil, and said first magnetic yoke is exposed to a surface of said protection film. - View Dependent Claims (31)
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Specification