Two-dimensional stepwise-controlled microstructure
First Claim
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1. A microstructure comprising:
- a structural film;
a pivot member connected with the structural film and supporting a base;
at least three noncollinear actuators connected with the structural film, each such actuator being configured to deflect the base towards the structural film upon activation; and
a movable stop, wherein the base assumes one of a plurality of tilt positions according to which of such actuators is activated and according to a position of such movable stop.
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Abstract
A microstructure for steering light is provided that may be stepwise controlled to provide tilt positions in two dimensions. The arrangement is two-dimensional since a tilt axis may be defined as the axis along which the base is tilted to move from one of the two tilt positions to the other. At least one additional tilt position is provided that cannot be reached from either of those two tilt positions by tilting the micromirror assembly along the tilt axis. Instead, such an additional tilt position requires that there at least be a tilt component in a direction orthogonal to the tilt axis.
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Citations
20 Claims
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1. A microstructure comprising:
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a structural film; a pivot member connected with the structural film and supporting a base; at least three noncollinear actuators connected with the structural film, each such actuator being configured to deflect the base towards the structural film upon activation; and a movable stop, wherein the base assumes one of a plurality of tilt positions according to which of such actuators is activated and according to a position of such movable stop. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for fabricating a microstructure for steering light, the method comprising:
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forming a pivot member on a structural film; forming a base on the pivot member; forming at least three noncollinear actuators over the structural film, each such actuator being configured to deflect the base towards the structural film upon activation; and forming a movable stop such that the base may assume a plurality of tilt positions by activating a selection of such actuators and moving the movable stop to a desired position. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A microstructure comprising:
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support means; structural means connected with the support means and tiltable to at least three tilt positions, wherein a first and second of such at least three tilt positions define a tilt axis and a third of such at least three tilt positions includes a tilt component orthogonal to the tilt axis, and wherein the structural means comprises movable stop means connected with the support means to define the at least three tilt positions. - View Dependent Claims (19, 20)
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Specification