Micromirror and post arrangements on substrates
First Claim
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1. A spatial light modulator comprising:
- an array of micromirrors, each micromirror comprising a mirror plate having four predominant sides and being held on a substrate by a plurality of posts, wherein the four predominant sides define two diagonals, and wherein a line between any two of the plurality of posts is not coincident with either of the two diagonals;
wherein the mirror plate is attached to a hinge that is supported by a post of the plurality of posts on the substrate; and
wherein the mirror plate and hinge are separated by a gap in a direction perpendicular to the mirror plate when the mirror plate is parallel to the substrate, wherein the substrate has four predominant sides that form a rectangular shape; and
wherein each side of the mirror plate is at an angle of from 5°
degrees to 25°
degrees to the two sides of the rectangular substrate.
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Abstract
A micromirror of a micromirror array of a spatial light modulator used in display systems comprises a mirror plate attached to a hinge that is supported by two posts formed on a substrate. Also the mirror plate is operable to rotate along a rotation axis that is parallel to but offset from a diagonal of the mirror plate when viewed from the top. An imaginary line connecting the two posts is not parallel to either diagonal of the mirror plate.
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Citations
21 Claims
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1. A spatial light modulator comprising:
an array of micromirrors, each micromirror comprising a mirror plate having four predominant sides and being held on a substrate by a plurality of posts, wherein the four predominant sides define two diagonals, and wherein a line between any two of the plurality of posts is not coincident with either of the two diagonals;
wherein the mirror plate is attached to a hinge that is supported by a post of the plurality of posts on the substrate; and
wherein the mirror plate and hinge are separated by a gap in a direction perpendicular to the mirror plate when the mirror plate is parallel to the substrate, wherein the substrate has four predominant sides that form a rectangular shape; and
wherein each side of the mirror plate is at an angle of from 5°
degrees to 25°
degrees to the two sides of the rectangular substrate.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
Specification