Optical ready wafers

• US 7,043,106 B2
• Filed: 10/25/2002
• Issued: 05/09/2006
• Est. Priority Date: 07/22/2002
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: West, Lawrence C., Maydan, Dan, Broydo, Samuel, Björkman, Claes
• Primary Examiner(s): HEALY, BRIAN
• Application Number:
  US10/280,492
• Publication Number:
  US 20040012041A1
• Time in Patent Office: 1,292 Days
• Field of Search: 385/14, 385/24, 385/31, 385/129, 385/130, 385/131, 385/132
• US Class Current: 385/14
• CPC Class Codes: G02B 6/12 of the integrated circuit kind electric integrated circuits H01L27/00
• CPC Class Codes: G02B 6/12004 Combinations of two or more optical elements
• CPC Class Codes: G02B 6/30 for use between fibre and thin-film device
• CPC Class Codes: G02B 6/4201 Packages, e.g. shape, construction, internal or external details
• CPC Class Codes: G02B 6/4214 the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device G02B6/4246 takes precedence
• CPC Class Codes: G02B 6/4245 Mounting of the opto-electronic elements
• CPC Class Codes: G02B 6/4257 having a supporting carrier or a mounting substrate or a mounting plate G02B6/3648 takes precedence
• CPC Class Codes: G02B 6/4274 Electrical aspects G02B6/4263 and G02B6/4265 take precedence
• CPC Class Codes: G02B 6/4283 with electrical insulation means
• CPC Class Codes: G02B 6/43 Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections

Abstract

An optical ready substrate made at least in part of a first semiconductor material and having a front side and a backside, the front side having a top surface that is of sufficient quality to permit microelectronic circuitry to be fabricated thereon using semiconductor fabrication processing techniques. The optical ready substrate includes an optical signal distribution circuit fabricated on the front side of the substrate in a first layer region beneath the top surface of the substrate. The optical signal distribution circuit is made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuitry to be fabricated thereon.

Claims

1. An article of manufacture comprising an optical ready substrate made at least in part of a first semiconductor material and having a front side and a backside, said front side having a top surface into which fabrication of microelectronic circuitry has not yet begun and being of sufficient quality to permit microelectronic circuitry to be fabricated therein at a later time by using semiconductor fabrication processing techniques, said optical ready substrate including a first layer region on the front side of the substrate and an optical signal distribution circuit fabricated in the substrate beneath the first layer region, said optical signal distribution circuit made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuitry to be fabricated therein at a later time.

2. The article of manufacture of claim 1 wherein the first layer region has a surface that defines said top surface of the optical ready substrate.

3. The article of manufacture of claim 2 wherein the semiconductor photonic elements of the optical distribution circuit include optical waveguides and output elements coupled to the optical waveguides for delivering signals carried by the waveguides to the microelectronic circuitry to be fabricated therein at a later time.

4. The article of manufacture of claim 3 wherein said output elements are optical detectors which convert optical signals to electrical signals.

5. The article of manufacture of claim 3 wherein said output elements are optical elements that function to redirect light signals traveling within the waveguides upward toward the top surface of the semiconductor substrate.

6. The article of manufacture of claim 2 wherein the optical distribution circuit further comprises optical input elements that function to couple incoming optical signals into the optical distribution circuit.

7. The article of manufacture of claim 2 wherein said output elements include at least one of a semiconductor element that functions to direct optical signals from the optical waveguides up toward the top surface and a semiconductor element that functions to convert the optical signals distributed by the optical waveguides to electrical signals.

8. The article of manufacture of claim 2 wherein the optical signal distribution circuit is an optical clock signal distribution network.

9. The article of manufacture of claim 2 wherein the first semiconductor material is silicon.

10. The article of manufacture of claim 1 wherein the optical ready substrate comprises a carrier substrate that is made at least in part of the first semiconductor material and a layer of second semiconductor material on top of and defining an interface with the carrier substrate, and wherein said optical signal distribution circuit is fabricated in the carrier substrate at the interface between the carrier substrate and the second semiconductor layer and wherein the layer of second semiconductor material defines the top surface of the optical ready substrate.

11. The article of manufacture of claim 10 wherein the semiconductor photonic elements of the optical distribution circuit include optical waveguides and output elements coupled to the optical waveguides for delivering signals carried by the waveguides to the microelectronic circuitry to be fabricated therein at a later time.

12. The article of manufacture of claim 11 wherein said output elements are optical detectors which convert optical signals to electrical signals.

13. The article of manufacture of claim 11 wherein said output elements are optical elements that function to redirect light signals traveling within the waveguides upward toward the top surface of the semiconductor substrate.

14. The article of manufacture of claim 10 wherein the optical distribution circuit further comprises optical input elements that function to couple incoming optical signals into the optical distribution circuit.

15. The article of manufacture of claim 10 wherein said output elements include at least one of a semiconductor element that functions to direct optical signals from the optical waveguides up toward the top surface and a semiconductor element that functions to convert the optical signals distributed by the optical waveguides to electrical signals.

16. The article of manufacture of claim 10 wherein the optical signal distribution circuit is an optical clock signal distribution network.

17. The article of manufacture of claim 10 wherein the first semiconductor material is silicon.

18. The article of manufacture of claim 10 wherein the second semiconductor material is silicon.

19. The article of manufacture of claim 1 wherein the optical ready substrate comprises a carrier substrate, an insulator layer on top of the carrier substrate, and a layer of second semiconductor material on top of the insulator layer, and wherein said optical signal distribution circuit is fabricated in the carrier substrate immediately below the insulator layer and wherein the layer of second semiconductor material defines the top surface of the optical ready substrate.

20. The article of manufacture of claim 19 wherein the semiconductor photonic elements of the optical distribution circuit include optical waveguides and output elements coupled to the optical waveguides for delivering signals carried by the waveguides to the microelectronic circuitry to be fabricated therein at a later time.

21. The article of manufacture of claim 20 wherein said output elements are optical detectors which convert optical signals to electrical signals.

22. The article of manufacture of claim 20 wherein said output elements are optical elements that function to redirect light signals traveling within the waveguides upward toward the top surface of the semiconductor substrate.

23. The article of manufacture of claim 19 wherein the optical distribution circuit further comprises optical input elements that function to couple incoming optical signals into the optical distribution circuit.

24. The article of manufacture of claim 19 wherein said output elements include at least one of a semiconductor element that functions to direct optical signals from the optical waveguides up toward the top surface and a semiconductor element that functions to convert the optical signals distributed by the optical waveguides to electrical signals.

25. The article of manufacture of claim 19 wherein the optical signal distribution circuit is an optical clock signal distribution network.

26. The article of manufacture of claim 19 wherein the first semiconductor material is silicon.

27. The article of manufacture of claim 19 wherein the second semiconductor material is silicon.

28. The article of manufacture of claim 19 wherein the insulator is made of SiO₂.

29. An article of manufacture comprising an optical ready substrate including a carrier substrate made at least in part of a first semiconductor material, an insulator layer on top of the carrier substrate, and a layer of second semiconductor material on top of the insulator layer, said layer of second semiconductor material defining a top surface that is of sufficient quality to permit microelectronic circuitry to be fabricated thereon using semiconductor fabrication processing techniques, said optical ready substrate also including an optical signal distribution circuit fabricated in the carrier substrate immediately below the insulator layer, said optical signal distribution circuit made up of interconnected semiconductor photonic elements and designed to provide signals to the microelectronic circuitry to be fabricated thereon.

30. The article of manufacture of claim 29 wherein the first and second semiconductor materials are silicon and wherein the insulator is made of SiO₂.

31. The article of manufacture of claim 29 wherein the optical signal distribution circuit is an optical clock signal distribution network.