Wide bandgap semiconductor waveguide structures

• US 7,043,129 B2
• Filed: 01/28/2003
• Issued: 05/09/2006
• Est. Priority Date: 06/16/2000
• Status: Active Grant

• Current Assignee: Wayne State University
• Original Assignee: Wayne State University
• Inventors: Auner, Gregory W., Safadi, Mona R.
• Primary Examiner(s): HEALY, BRIAN
• Application Number:
  US10/353,757
• Publication Number:
  US 20040146264A1
• Time in Patent Office: 1,197 Days
• Field of Search: 385/14, 385/129, 385/130, 385/131, 385/132, 385/141
• US Class Current: 385/130
• CPC Class Codes: A61N 5/0601 Apparatus for use inside the body
• CPC Class Codes: G02B 6/102 for infrared and ultraviolet radiation
• CPC Class Codes: G02B 6/12002 Three-dimensional structures
• CPC Class Codes: G02B 6/122 Basic optical elements, e.g. light-guiding paths
• CPC Class Codes: G02B 6/13 Integrated optical circuits characterised by the manufacturing method
• CPC Class Codes: G02B 6/136 by etching
• CPC Class Codes: G02B 6/30 for use between fibre and thin-film device

Abstract

A waveguide structure for transmitting broad spectrum light, includes a wide bandgap semiconductor thin film arranged on a substrate and ablated to form a waveguide channel to transmit the broad spectrum light.

Claims

1. A waveguide structure for transmitting broad spectrum light, comprising:

a wide bandgap semiconductor thin film arranged on a substrate and ablated to form a waveguide channel to transmit the broad spectrum light.

2. The waveguide structure of claim 1, wherein the broad spectrum light includes ultraviolet light and infrared light.

3. The waveguide structure of claim 1, wherein the broad spectrum light includes light with a range of 5 microns to 750 nanometers.

4. The waveguide structure of claim 1, wherein the wide bandgap semiconductor thin film includes aluminum nitride and the substrate includes sapphire.

5. The waveguide structure of claim 1, wherein the waveguide channel is approximately 5 μ

m to 50 μ

m wide.

6. The waveguide structure of claim 1, further comprising:

a termination hole for the light to exit the waveguide structure.

7. The waveguide structure of claim 6, further comprising:

a pixelated array of termination holes to direct the broad spectrum light.

8. A waveguide structure for transmitting broad spectrum light for use with a physiological delivery system, comprising:

a wide bandgap semiconductor thin film arranged on a substrate and ablated to form a waveguide channel to transmit the broad spectrum light;

wherein the waveguide structure is integrated with the physiological drug delivery system.

9. The waveguide structure of claim 8, wherein the physiological drug delivery system includes a microfluidic retinal prosthesis.

10. A waveguide structure for transmitting broad spectrum light for use with a miniaturized spectrometer system, comprising:

a wide bandgap semiconductor thin film arranged on a substrate and ablated to form a waveguide channel to transmit the broad spectrum light;

wherein the waveguide structure is arranged to transmit light to the miniaturized spectrometer system.