Vibrators and vibratory gyroscopes

• US 7,043,986 B2
• Filed: 02/02/2004
• Issued: 05/16/2006
• Est. Priority Date: 02/05/2003
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: NGK Insulators Limited
• Inventors: Kikuchi, Takayuki, Osugi, Yukihisa
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): Bellamy, Tamiko
• Application Number:
  US10/770,367
• Publication Number:
  US 20040154395A1
• Time in Patent Office: 834 Days
• Field of Search: 735/041.2, 735/041.4, 735/041.6, 735/040.2, 736/62, 73/17.7, 735/040.3, 735/040.4, 735/143.4, 736/51, 310/311, 310/321, 310/330, 310/370
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719

Abstract

A vibrator for generating a signal for measuring a physical quantity using a vibrator is provided, including at least one bending vibration arm vibrating in bending mode along a specified plane and having a first end, an opposed second end, and first and second main faces that are substantially parallel with each other. A base portion is provided at the first provided at the first end of the bending vibration arm, a weight portion is provided at the second end of the bending vibration arm, and grooves are formed on the first and second main faces. The vibrator further includes driving means for exciting a driving vibration in the vibrator, and detecting means provided on one of the bending vibration arms for detecting an output signal based on detection vibrations induced in the vibrator responsive to the physical quantity to be measured.

Claims

1. A vibrator comprising:

at least one bending vibration arm vibrating in bending mode along a specified plane, said bending vibration arm having first and second ends and first and second main faces that are substantially parallel with each other;

a base portion provided at one of said first and said second ends of said bending vibration arm;

a groove formed on each said first and second main faces; and

a through hole formed between said first main face and said second main face and in communication with said grooves.

2. The vibrator of claim 1, wherein said grooves comprises a tapered portion having a reduced width proximate said base portion.

3. The vibrator of claim 1, wherein said through hole is in communication with each said groove at a first end of said grooves.

4. The vibrator of claim 3, further comprising a plurality of said through holes, wherein one of said plurality of through holes is in communication with said first end of each said groove and another of said through holes is in communication with a second end of each said groove.

5. The vibrator of claim 1, wherein said bending vibration arm further comprises a weight portion at a tip of the other one of said first and said second ends of said bending vibration arm.

6. A device for generating a signal for measuring a physical quantity using a vibrator, said device comprising:

the vibrator of claim 1;

driving means for exciting a driving vibration in said vibrator; and

detecting means for detecting an output signal based on a detection vibration induced in said vibrator responsive to said physical quantity.

7. A vibrator comprising:

a first bending vibration arm vibrating in a bending mode along a specified plane;

a second bending vibration arm vibrating in a bending mode along said specified plane;

a base portion provided between said first and said second vibration arms;

a first main face; and

a groove continuously formed in said first bending vibration arm, said second bending vibration arm and said base portion on said first main face.

8. The vibrator of claim 7, wherein said vibrator further comprises a second main face substantially parallel with said first main face, and wherein another groove is continuously formed in said first bending vibration arm, said second bending vibration arm and said base portion on said second main face.

9. The vibrator of claim 8, wherein said first bending vibration arm further comprises a through hole between said first and said second main faces, and wherein said through hole is in communication with said grooves.

10. The vibrator of claim 9, wherein said second bending vibration arm further comprises a through hole between said first and said second main faces, and wherein said through hole is in communication with said grooves.

11. The vibrator of claim 7, wherein said first bending vibration arm comprises a weight portion at a tip end of said first bending vibration arm.

12. The vibrator of claim 11, wherein said second bending vibration arm comprises a weight portion at a tip end of said second bending vibration arm.

13. The vibrator of claim 7, wherein said groove comprises a tapered portion having a reduced width proximate said base portion at least in said first bending vibration arm.

14. The vibrator of claim 11, wherein said groove comprises a tapered portion having a reduced width proximate said base portion at least in said first bending vibration arm.

15. The vibrator of claim 7, wherein said groove comprises a tapered portion having a reduced width proximate said base portion at least in said second bending vibration arm.

16. The vibrator of claim 12, wherein said groove comprises a tapered portion having a reduced width proximate said base portion at least in said second bending vibration arm.

17. A device for generating a signal for measuring a physical quantity using a vibrator, said device comprising:

the vibrator of claim 7;

driving means for exciting a driving vibration in said vibrator; and

detecting means for detecting an output signal based on a detection vibration induced in said vibrator responsive to said physical quantity.

18. A vibrator comprising:

a first bending vibration arm vibrating in bending mode along a specified plane;

a second bending vibration arm vibrating in bending mode along said specified plane;

a base portion provided between said first and said second bending vibration arms;

a first main face; and

a groove continuously formed in said first bending vibration arm and said base portion on said first main face;

wherein said first and said second bending vibration arms are formed along a substantially straight line.

20. The vibrator of claim 18, wherein said groove comprises a tapered portion having a reduced width proximate said base portion at least in said first bending vibration arm.

22. A device for generating a signal for measuring a physical quantity using a vibrator, said device comprising:

the vibrator of claim 18;

driving means for exciting a driving vibration in said vibrator; and

detecting means for detecting an output signal based on a detection vibration induced in said vibrator responsive to said physical quantity.

19. The vibrator comprising:

a first bending vibration arm vibrating in a bending mode along a specified plane;

a second bending vibration arm vibrating in a bending mode along said specified plane;

a base portion provided between said first and said second bending vibration arms;

a first main face;

a first groove continuously formed in said first bending vibration arm and said base portion on said first main face; and

a second groove continuously formed in said second bending vibration arm and said base portion on said first main face;

wherein said first and said second bending vibration arms are formed along a substantially straight line.

21. The vibrator of claim 19, wherein said second groove comprises a tapered portion having a reduced width proximate said base portion at least in said second bending vibration arm.

23. The vibrator of claim 19, wherein said first groove comprises a tapered portion having a reduced width proximate said base portion at least in said first bending arm.