Rotary gyroscope
First Claim
1. A rotary gyroscope, comprising:
- a base plate;
an intermediate structure, including;
a driven element supported in a spaced-apart relation from the base plate and floating over the base plate and supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is normal to a center plane thereof;
a driving electrode driving the driven element to perform the oscillating motion with respect to the first axis;
a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is normal to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis; and
a drive sensing part controlling the oscillating motion of the driven element including;
a drive sensing electrode pad part arranged around the driven element;
a plurality of movable drive sensing comb portions formed on supporting arms of the driving supporter and at least one sensing arm arranged with respect to the drive sensing electrode pad part around the driven element; and
a plurality of fixed drive sensing comb portions formed on the drive sensing electrode pad part to be arranged opposite to respective movable drive sensing comb portions in a spaced-apart relation therewith; and
a cover covering the intermediate structure and having a sensing electrode arranged in a position corresponding to the sensing element in a spaced-apart relation therewith to detect the sensing motion of the sensing element.
1 Assignment
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Accused Products
Abstract
A rotary gyroscope includes a base plate, an intermediate structure, including a driven element floating over the base plate and supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is normal to a center plane thereof, a driving electrode driving the driven element, and a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is normal to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis, and a cover covering the intermediate structure and having a sensing electrode to detect the sensing motion of the sensing element.
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Citations
22 Claims
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1. A rotary gyroscope, comprising:
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a base plate; an intermediate structure, including; a driven element supported in a spaced-apart relation from the base plate and floating over the base plate and supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is normal to a center plane thereof; a driving electrode driving the driven element to perform the oscillating motion with respect to the first axis; a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is normal to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis; and a drive sensing part controlling the oscillating motion of the driven element including; a drive sensing electrode pad part arranged around the driven element; a plurality of movable drive sensing comb portions formed on supporting arms of the driving supporter and at least one sensing arm arranged with respect to the drive sensing electrode pad part around the driven element; and a plurality of fixed drive sensing comb portions formed on the drive sensing electrode pad part to be arranged opposite to respective movable drive sensing comb portions in a spaced-apart relation therewith; and a cover covering the intermediate structure and having a sensing electrode arranged in a position corresponding to the sensing element in a spaced-apart relation therewith to detect the sensing motion of the sensing element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A rotary gyroscope, comprising:
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a base plate; an intermediate structure, including; a driven element supported in a spaced-apart relation from the base plate and floating over the base plate as supported by a driving supporter radially extending therefrom, the driven element performing an oscillating motion with respect to a first axis, which is normal to a center plane thereof; a driving electrode driving the driven element to perform the oscillating motion with respect to the first axis; a sensing element disposed in the driven element and connected to the driven element by a sensing connector to oscillate together with the driven element and concurrently to perform a sensing motion with respect to a third axis, which is vertical to the first axis and any second axis, which is parallel to a center plane, due to a Coriolis force when an angular velocity is inputted from the second axis, wherein the sensing element includes a circular disk having a circular hole formed at a center thereof; and a cover covering the intermediate structure and having a sensing electrode arranged in a position corresponding to the sensing element in a spaced-apart relation therewith to detect the sensing motion of the sensing element, wherein the intermediate structure further includes a fixing portion disposed in the circular hole in a spaced-apart relation therewith to interconnect the base plate and the cover.
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Specification