Angular velocity sensor
First Claim
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1. A circuit for amplifying outputs of an angular velocity sensor element, said sensor element having first and second sensing electrodes, said circuit comprising;
- a pair of input channels to which said first and second sensing electrodes of said angular velocity sensor element are connected respectively,a differential amplifier which amplifies a difference in outputs from said pair of input channels, anda self-diagnosis circuit which couples a test signal to one of said pair of input channels.
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Abstract
An angular velocity sensor of the present invention includes a driving part for stably vibrating a driving part of a sensor element and a detector part for detecting an angular velocity of the sensor element and obtains a self diagnosis signal for a malfunction by detecting a mechanical coupling signal obtained at the detection part.
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Citations
6 Claims
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1. A circuit for amplifying outputs of an angular velocity sensor element, said sensor element having first and second sensing electrodes, said circuit comprising;
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a pair of input channels to which said first and second sensing electrodes of said angular velocity sensor element are connected respectively, a differential amplifier which amplifies a difference in outputs from said pair of input channels, and a self-diagnosis circuit which couples a test signal to one of said pair of input channels. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification