Microfabrication method based on metal matrix composite technology

• US 7,045,069 B2
• Filed: 11/06/2003
• Issued: 05/16/2006
• Est. Priority Date: 11/14/2002
• Status: Expired due to Fees

• Current Assignee: Gennady Ozeryansky
• Original Assignee: Gennady Ozeryansky
• Inventors: Ozeryansky, Gennady
• Primary Examiner(s): Ahmed, Shamim
• Application Number:
  US10/702,856
• Publication Number:
  US 20040094503A1
• Time in Patent Office: 922 Days
• Field of Search: 216/2, 216 7- 9, 216/11, 430/320, 428/606, 428/611, 428/614
• US Class Current: 216/11
• CPC Class Codes: A61M 2037/003 having a lumen
• CPC Class Codes: A61M 2037/0038 having a channel at the side surface
• CPC Class Codes: A61M 2037/0053 Methods for producing microneedles
• CPC Class Codes: A61M 37/0015 by using microneedles
• CPC Class Codes: C23F 1/04 Chemical milling
• CPC Class Codes: Y10T 428/12431 Foil or filament smaller than 6 mils
• CPC Class Codes: Y10T 428/12465 having magnetic properties, or preformed fiber orientation coordinate with shape
• CPC Class Codes: Y10T 428/12486 Laterally noncoextensive components [e.g., embedded, etc.]

Abstract

A method of fabricating microstructural components, microparts assemblies and microparts is disclosed. The method includes fabricating a unidirectional metal matrix composite made of materials selected to allow precise etching of different structural elements of the given composite without damage to each other. Cutting a composite to form slices or sections. Etching a matrix entirely out will produce wide assortment of microparts. Partial removal of matrix will form an array of microprotrusions protruding from a substrate. Etching out the microprotrusions cores will form hollow microprotrusions. The method of invention is suitable for fabricating of variety of microcomponents. For example: microneedles—a medical microdevice component having micron features, arrays of high strength micropins and micropunches, and precisely controlled unique microstructural surfaces.

Claims

1. A method for fabricating microparts comprising the steps of:

(A) fabricating a unidirectional metal matrix composite rod of predetermined dimensions and shape comprising of;

(a) a matrix made of a first material and (b) at least one longitudinal element of predetermined dimensions and shape within said matrix made of a second material, (c) structure of said metal matrix composite is defined by plurality of said longitudinal elements spaced apart by surrounding said matrix material in substantially parallel arrangement, (d) said first or matrix material has to be selected to be different from said second or longitudinal elements material to such extent that said difference will allow removing of said matrix by a chemical reagent to the reaction of which said longitudinal elements are essentially chemically inert;

(B) cutting said metal matrix composite in transverse direction, whereby forming sections of predetermined length;

(C) utilizing said chemical reagent removing of said matrix from said sections completely, whereby forming at least one micropart of predetermined dimensions and shape, length of said microparts is equal to the length of said metal matrix composite sections wherein, said longitudinal elements having at least one core made of a third material, said third material has to be selected to be different from said longitudinal elements material to such extent that said difference will allow removing of said cores by said chemical reagent to the reaction of which said longitudinal elements are essential chemically inert;

(D) utilizing said chemical reagent removing said core material and said matrix material from said sections completely, whereby forming at least one hollow micropart of predetermined dimensions and shape, wherein length of said hollow microparts is equal to the length of said metal matrix composite sections.

2. A method of fabricating hollow microneedles or hollow microprotrusions, comprising the steps of:

(A) fabricating a unidirectional metal matrix composite rod of predetermined dimensions and shape comprising of;

(a) a matrix made of a first material and (b) at least one longitudinal element within said matrix made of a second material, (c) said longitudinal elements are having cores made of a third material, (d) structure of said metal matrix composite rod is defined by plurality of said longitudinal elements spaced apart by surrounding said matrix material in substantially parallel arrangement, (e) said first or matrix material has to be selected to be different from said second or longitudinal elements material to such extent that said difference will allow removing of said matrix by a first chemical reagent to the reaction of which said longitudinal elements are essentially chemically inert, (f) said third or core material has to be selected to be different from said second or longitudinal elements material and the first or said matrix material to such extent that said difference will allow removing of said cores by a second chemical reagent to the reaction of which said longitudinal elements and said matrix are essentially chemically inert;

(B) cutting said metal matrix composite rod in transverse direction, whereby forming slices of predetermined thickness;

(C) utilizing said second chemical reagent removing said third or core material completely, whereby forming hollow shafts inside of said longitudinal elements;

(D) utilizing said first chemical reagent partial removing, preferably from the one side of said slices, a substantially planar layer of predetermined thickness of said matrix, whereby forming a substantially planar substrate or a base having an array of hollow microprotrusions or hollow microneedles protruding from and attached to said substrate, length of said microneedles is equal to the thickness of said matrix layer removed.

3. The method of claim 2 further including:

fitting of said metal matrix composite slices into a housing prior to etching, (a) said housing is chemically inert to any chemical reagents utilized in the process, whereby (b) said housing facilitates handling and protects said microneedles being processed and (c) said housing also facilitates assembling of said microneedles with a device.

4. The method of claim 2 wherein said substrate or base having thickness range within 0.2 to 2 millimeters.

5. The method of claim 2 wherein said hollow microprotrusions or hollow microneedles having diameter range within 30 to 200 microns.

6. The method of claim 2 wherein said hollow microprotrusions or hollow microneedles having length range within 150 to 3000 microns.

7. The method of claim 2 wherein said metal matrix composite rod is made by

(a) extrusion of a billet having predetermined diameter and length, (b) said billet having at least one hole, (c) each said hole having at least one subelement rod inside, (d) each said subelement rod having at least one longitudinal element or a subelement-core.

8. The method of claim 2 wherein said metal matrix composite rod is made by

(a) extrusion of a billet having predetermined diameter and length, (b) said billet is a tube of predetermined diameter and length, (c) said billet is filled with plurality of subelement rods of predetermined shape and predetermined dimensions, (c) plurality of said subelement rods are packed into a substantially tight fit bundle and fill up said billet, (d) each said subelement rod having at least one longitudinal element or a subelement-core.

9. The method of claim 2 wherein said metal matrix composite rod having a non-etching barrier of predetermined thickness around said rod circumference, said non-etching barrier has to be made of material selected to resist any reagents utilized in removing the matrix and core materials.

10. A method of fabricating small metal parts comprising the steps of:

(A) utilizing available state of the art in metalworking to fabricate a rod having scaled up cross section of predetermined shape essentially the same as a future part cross section but on substantially larger scale;

(B) encasing at least one of said rods in a metal jacket forming a subelement billet having said rod as a core and said jacket as a matrix;

(C) reducing said subelement billet to predetermined size and shape forming subelements, said subelements having said shaped rods as a subelement-core;

(D) assembling a second stage billet using at least one said subelement as a building block;

(E) reducing said second stage billet to predetermined size to form a metal matrix composite rod with structure defined by plurality of said subelement-cores spaced apart in predetermined order by surrounding said matrix material in substantially parallel arrangement;

(F) said matrix material has to be selected to be different from said shaped rods material to such extend that said difference will allow removing of said matrix by a chemical reagent to the reaction of which said shaped rods are essentially chemically inert;

(G) cutting said metal matrix composite rod in transverse direction, whereby forming sections of predetermined length;

(H) Utilizing said chemical reagent removing of said matrix from said sections completely, whereby forming plurality of small parts, length of said small parts is equal to the length of said sections.

11. The method of claim 10 further including:

(A) providing said shaped rods having at least one core of predetermined shape and dimensions made of material, which has to be selected to be different from said shaped rods material to such extent that said difference will allow removing of said cores by a chemical reagent to the reaction of which said shaped rods are essentially chemically inert;

(B) removing said core material completely, whereby forming hollow shafts inside of said shaped rods;

(C) removing of said matrix from said sections completely, whereby forming at least one hollow small metal part of predetermined dimensions and shape, length of said small parts is equal to the length of the metal matrix composite sections.

12. The method of claim 11 wherein said small parts having 0.5 to 500 microns cross-sectional dimensions and up to 50 millimeters in length.

13. The method of claim 11 wherein said small parts having 0.5 to 6 millimeters cross-sectional dimensions.

14. The method of claim 11 wherein said parts having 6 to 25 millimeters cross-sectional dimensions.