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Microfabrication method based on metal matrix composite technology

  • US 7,045,069 B2
  • Filed: 11/06/2003
  • Issued: 05/16/2006
  • Est. Priority Date: 11/14/2002
  • Status: Expired due to Fees
First Claim
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1. A method for fabricating microparts comprising the steps of:

  • (A) fabricating a unidirectional metal matrix composite rod of predetermined dimensions and shape comprising of;

    (a) a matrix made of a first material and (b) at least one longitudinal element of predetermined dimensions and shape within said matrix made of a second material, (c) structure of said metal matrix composite is defined by plurality of said longitudinal elements spaced apart by surrounding said matrix material in substantially parallel arrangement, (d) said first or matrix material has to be selected to be different from said second or longitudinal elements material to such extent that said difference will allow removing of said matrix by a chemical reagent to the reaction of which said longitudinal elements are essentially chemically inert;

    (B) cutting said metal matrix composite in transverse direction, whereby forming sections of predetermined length;

    (C) utilizing said chemical reagent removing of said matrix from said sections completely, whereby forming at least one micropart of predetermined dimensions and shape, length of said microparts is equal to the length of said metal matrix composite sections wherein, said longitudinal elements having at least one core made of a third material, said third material has to be selected to be different from said longitudinal elements material to such extent that said difference will allow removing of said cores by said chemical reagent to the reaction of which said longitudinal elements are essential chemically inert;

    (D) utilizing said chemical reagent removing said core material and said matrix material from said sections completely, whereby forming at least one hollow micropart of predetermined dimensions and shape, wherein length of said hollow microparts is equal to the length of said metal matrix composite sections.

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