Preparation of group IVA and group VIA compounds

• US 7,045,451 B2
• Filed: 04/02/2004
• Issued: 05/16/2006
• Est. Priority Date: 04/05/2003
• Status: Active Grant

• Current Assignee: Rohm and Haas Electronic Materials LLC (DuPont de Nemours, Inc.)
• Original Assignee: Rohm and Haas Electronic Materials LLC (DuPont de Nemours, Inc.)
• Inventors: Shenai-Khatkhate, Deodatta Vinayak
• Primary Examiner(s): Nhu, David
• Application Number:
  US10/817,571
• Publication Number:
  US 20040198042A1
• Time in Patent Office: 774 Days
• Field of Search: 438/602, 438/603, 438/604, 438/513, 438/608, 438/676, 438/677, 438/678, 438/679, 438/681, 438/255, 438/480, 438/752, 438/753, 438/503, 438/507, 438/933
• US Class Current: 438/602
• CPC Class Codes: C07C 391/00 Compounds containing selenium
• CPC Class Codes: C07C 395/00 Compounds containing tellurium
• CPC Class Codes: C07F 5/00 Compounds containing elements of Groups 3 or 13 of the Periodic Table
• CPC Class Codes: C07F 5/064 compounds with an Al-Halogen linkage
• CPC Class Codes: C07F 7/0807 comprising Si as a ring atom
• CPC Class Codes: C07F 7/0827 Syntheses with formation of a Si-C bond
• CPC Class Codes: C07F 7/30 Germanium compounds
• CPC Class Codes: C23C 16/18 from metallo-organic compounds
• CPC Class Codes: C23C 16/28 Deposition of only one other non-metal element

Abstract

Methods of preparing Group IVA and Group VIA organometallic compounds, particularly Group IVA organometallic compounds, are provided. Such manufacturing methods employ an amine and/or phosphine catalyst in a transalkylation step and may be performed in a batch, semi-continuous or continuous manner.

Claims

1. A method of preparing an organometallic compound comprising the step of:

reacting a metal halide of the formula R_mMX_4-m with a Group IIIA compound of the formula R¹_nM¹X¹_3-n in the presence of a catalyst chosen from a tertiary amine, a tertiary phosphine and mixtures thereof in an organic solvent to provide an alkylmetal compound, wherein each R is independently chosen from H, alkyl, alkenyl, alkynyl and aryl;

M is chosen from a Group IVA metal and a Group VIA metal;

each X is independently a halogen;

each R¹ is independently chosen from (C₁–

C₆)alkyl;

M¹ is a Group IIIA metal,;

each X¹ is independently a halogen;

m=0–

3; and

n=1–

3.

2. The method of claim 1 wherein M is chosen from silicon, germanium, tin, tellurium and selenium.

3. The method of claim 1 wherein M¹ is chosen from boron, aluminum, gallium, indium and thallium.

4. The method of claim 1 wherein the tertiary amine has the formula NR⁴R⁵R⁶, wherein R⁴, R⁵ and R⁶ are independently selected from (C₁–

C₆)alkyl, di(C₁–

C₆)alkylamino-substituted (C₁–

C₆)alkyl and phenyl, and wherein R⁴ and R⁵ may be taken together along with the nitrogen to which they are attached to form a 5–

7 membered heterocyclic ring.

5. The method of claim 1 wherein the metal halide and the Group IIIA compound are present in a mole ratio of 1:

0.1 to 1;

5.

6. The method of claim 1 wherein the alkylmetal compound comprises one or more halogens.

7. The method of claim 6 further comprising the step of reacting the alkylmetal compound with a reducing agent to provide an alkylmetal hydride.

8. The method of claim 6 further comprising the step of reacting the alkylmetal compound with an alkylating agent or arylating agent.

9. The method of claim 6 further comprising the step of reacting the alkylmetal compound with a second Group IIIA compound of the formula R¹_nM¹X¹_3-n in the presence of a tertiary amine.

10. The method of claim 1 wherein the reaction is batch, semi-continuous or continuous.