Multi-grid ion beam source for generating a highly collimated ion beam

• US 7,045,793 B2
• Filed: 06/14/2004
• Issued: 05/16/2006
• Est. Priority Date: 04/04/2002
• Status: Expired due to Fees

• Current Assignee: Veeco Instruments Incorporated
• Original Assignee: Veeco Instruments Incorporated
• Inventors: Wåhlin, Erik Karl Kristian
• Primary Examiner(s): Lee, John R.
• Assistant Examiner(s): Souw, Bernard E.
• Application Number:
  US10/867,580
• Publication Number:
  US 20050017645A1
• Time in Patent Office: 701 Days
• Field of Search: 315/111.21, 315/111.31, 315/111.01, 315/111.11, 315/111.61, 315/111.81, 315/111.91, 250/423.R, 250/424, 250/396.R, 313/359.1, 313/360.1, 313/361.1, 313/362.1, 313/363.1
• US Class Current: 250/396.00R
• CPC Class Codes: H01J 27/024 Extraction optics, e.g. grids

Abstract

A multi-grid ion beam source has an extraction grid, an acceleration grid, a focus grid, and a shield grid to produce a highly collimated ion beam. A five grid ion beam source is also disclosed having two shield grids. The extraction grid has a high positive potential and covers a plasma chamber containing plasma. The acceleration grid has a non-positive potential. The focus grid is positioned between the acceleration grid and the shield grid. The combination of the extraction grid and the acceleration grid extracts ions from the plasma. The focus grid acts to change momentum of the ions exiting the acceleration grid, focusing the ions into a more collimated ion beam than previous approaches. In one embodiment, the focus grid has a large positive potential. In another embodiment, the focus grid has a large negative potential.

Claims

1. A grid optics system for extracting ions from a plasma source and propelling the ions toward a target in a substantially collimated ion beam directed along an axis extending between the plasma source and the target, the grid optics system comprising:

a dished extraction grid spaced downstream from the plasma source along the axis and substantially normal to the axis;

a dished acceleration grid spaced downstream from the extraction grid along the axis between the extraction grid and the target and substantially normal to the axis, the electrical extraction potential and the electrical acceleration potential operating in combination to extract the ions from the plasma source;

a dished focus grid spaced downstream from the acceleration grid along and substantially normal to the axis between the acceleration grid and the target to focus the ions exiting the acceleration grid into a substantially collimated ion beam along the axis; and

a dished shield grid spaced downstream from the focus grid along and substantially normal to the axis between the focus grid and the target to locate a neutralization plane near the shield grid.

2. The grid optics system of claim 1 wherein the dished extraction grid has a positive electrical extraction potential.

3. The grid optics system of claim 1 wherein the dished extraction grid has a negative electrical extraction potential.

4. The grid optics system of claim 1 wherein the dished focus grid has a positive electrical focus potential and the dished shield grid has a negative shield potential.

5. The grid optics system of claim 1 wherein the dished focus grid has a negative electrical focus potential and the dished shield grid has a neutral shield potential.

6. The grid optics system of claim 1 wherein the dished shield grid is a first shield grid and further comprising:

a second dished shield grid spaced between the dished acceleration grid and the dished focus grid.

7. The grid optics system of claim 6 wherein the first dished shield grid has a neutral electrical potential and the second dished shield grid has a neutral electrical potential.

8. The grid optics system of claim 6 wherein the first dished shield grid has a negative electrical potential and the second dished shield grid has a negative electrical potential.

9. The grid optics system of claim 6 wherein the first dished shield grid and the second dished shield grid have the same electrical potential.

10. The grid optics system of claim 1 wherein the focus grid has a thickness that exceeds a thickness of at least one of the acceleration grid, the extraction grid, and the shield grid.

11. The gild optics system of claim 1 wherein the shield grid has a smaller aperture tan at least one of the acceleration grid, the extraction grid, and the focus grid.

12. The grid optics system of claim 1 wherein the focus grid has a larger aperture than at least one of the acceleration grid, the extraction grid, and the shield grid.

13. The grid optics system of claim 1 wherein the spacing between the extraction grid and the acceleration grid is larger than the spacing between the acceleration grid and the focus grid.

14. The grid optics system of claim 1 wherein the distance between the upstream surface of the extraction grid and the downstream surface of the acceleration grid is smaller than the distance between the downstream surface of the acceleration grid and the downstream surface of the shield grid.

15. A grid optics system for extracting ions from a plasma source and propelling the ions toward a target in a substantially collimated ion beam directed along an axis extending between the plasma source and to target, the grid optics system comprising:

an extraction grid spaced downstream from the plasma source along the axis and substantially normal to the axis;

an acceleration grid spaced downstream from the extraction grid along the axis between the extraction grid and the target and substantially normal to the axis, the electrical extraction potential and the electrical acceleration potential operating in combination to extract to ions from the plasma source;

a focus grid spaced downstream from the acceleration grid along and substantially normal to the axis between the acceleration grid and the target to focus the ions exiting the acceleration grid into a substantially collimated ion beam along the axis;

a first shield grid spaced downstream from the focus grid along and substantially normal to the axis between the Locus grid and the target; and

a second shield grid spaced downstream from to acceleration grid along and substantially normal to the axis between the acceleration grid and the focus grid.

16. The grid optics system of claim 15 wherein the first dished shield grid has a neural electrical potential and the second dished shield grid has a neutral electrical potential.

17. The grid optics system of claim 15 wherein the first dished shield grid has a negative electrical potential and the second dished shield grid has a negative electrical potential.

18. The grid optics system of claim 15 wherein the first dished shield grid and the second dished shield grid have the same electrical potential.

19. A grid optics system for extracting ions from a plasma source and propelling the ions toward a target in a substantially collimated ion beam directed along an axis extending between the plasma source and the target, the grid optics system comprising:

an extraction grid spaced downstream from the plasma source along the axis and substantially normal to the axis, the extraction grid including apertures having a diameter;

an acceleration grid spaced downstream from to extraction grid along the axis between the extraction grid and the target and substantially normal to the axis, the electrical extraction potential and the electrical acceleration potential operating in combination to extract the ions from the plasma source, wherein the extraction grid and the acceleration grid are separated by a distance greater than or equal to the diameter of an aperture in the extraction grid;

a focus grid spaced downstream from the acceleration grid along and substantially normal to the axis between the acceleration grid and the target to focus the ions exiting the acceleration grid into a substantially collimated ion beam along the axis; and

a shield grid spaced downstream from to focus grid along and substantially normal to the axis between the focus grid and the target to locate a neutralization plane near the shield grid.

20. The grid optics system of claim 19 wherein each of the acceleration grid, the focus grid, and the shield grid includes apertures having a diameter, wherein the diameter of apertures in the focus grid are greater than the diameter of apertures in at least one of the extraction grid, the acceleration grid, and the shield gild.