Flat actuator or sensor with internal prestress
First Claim
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1. A flat multilayered component for use as an actuator or sensor, the flat multilayered component comprising:
- a layer of electrically activatable material;
a passive middle layer disposed adjacent said layer of electrically activatable material;
a further passive material layer disposed adjacent said passive middle layer, said passive middle layer having a higher coefficient of linear thermal expansion than both of said layer of electrically activatable material and said further passive material layer, wherein said layer of electrically activatable material has a first thickness and said further passive material layer has a second thickness, and wherein a ratio of the first thickness and the second thickness is such that about the same mechanical expansion occurs in said layer of electrically activatable material and said further passive material layer for a given change in an operating temperature of the flat multilayered component andwherein the passive middle layer and the further passive material layer are formed of metal.
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Abstract
A flat multilayered component for use as an actuator or a sensor, is described. The flat multilayered component contains a layer of electrically activatable material, a passive middle layer disposed adjacent the layer of electrically activatable material, and a further passive material layer disposed adjacent the passive middle layer. The passive middle layer has a higher coefficient of linear thermal expansion than both of the layer of electrically activatable material and the further passive middle layer.
35 Citations
19 Claims
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1. A flat multilayered component for use as an actuator or sensor, the flat multilayered component comprising:
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a layer of electrically activatable material; a passive middle layer disposed adjacent said layer of electrically activatable material; a further passive material layer disposed adjacent said passive middle layer, said passive middle layer having a higher coefficient of linear thermal expansion than both of said layer of electrically activatable material and said further passive material layer, wherein said layer of electrically activatable material has a first thickness and said further passive material layer has a second thickness, and wherein a ratio of the first thickness and the second thickness is such that about the same mechanical expansion occurs in said layer of electrically activatable material and said further passive material layer for a given change in an operating temperature of the flat multilayered component and wherein the passive middle layer and the further passive material layer are formed of metal. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A flat multi-layered actuator, comprising:
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a piezoceramic layer having a plurality of sub-layers; a first thermal metallic layer disposed adjacent to the piezoceramic layer; and a second thermal metallic layer disposed adjacent the first thermal metallic layer, wherein the first thermal metallic layer has a higher coefficient of thermal expansion than each of the piezoceramic layer and the second thermal metallic layer, wherein said piezoceramic layer has a first thickness and said second thermal metallic layer has a second thickness, and wherein a ratio of the first thickness and the second thickness is such that about the same mechanical expansion occurs in said piezoceramic layer and said second thermal metallic layer for a given change in an operating temperature of the flat multilayered actuator. - View Dependent Claims (9, 10)
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11. A flat multilayered component for use as an actuator or sensor, the flat multilayered component comprising:
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a layer of electrically activatable material; a passive middle layer disposed adjacent said layer of electrically activatable material; a further passive material layer disposed on a side of the passive middle layer opposite the layer of electrically activatable material, said passive middle layer having a higher coefficient of linear thermal expansion than both of said layer of electrically activatable material and said further passive material layer; and wherein the layer of electrically activatable material and the further passive material layer are sized such that approximately the same mechanical expansion occurs in said layer of electrically activatable material as said further passive material layer for a given change in an operating temperature of the flat multilayered component; and wherein the further passive material layer is formed of metal. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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Specification