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System and method for dose control in a lithographic system

  • US 7,046,413 B2
  • Filed: 07/29/2005
  • Issued: 05/16/2006
  • Est. Priority Date: 05/29/2003
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • an illumination system comprising,a light source; and

    an adjusting system including an optical attenuator that adjusts light output from the light source to produce a desired light output signal; and

    a spatial light modulator arranged to receive the light output signal.

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